Specific Process Knowledge/Back-end processing/Micro transfer printer: Difference between revisions

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[[Category: Equipment|Backend]]
[[Category: Equipment|Backend]]
[[Category: Bckend]]
[[Category: Backend]]


__TOC__
=Micro Transfer Printer=
Micro transfer printing is an emerging technique to transfer diverse and non-native components from source substrate to target substrate. Micro transfer printing is best for achieving heterogeneous integration,
where micro-components from different sources are picked up by polymer stamp and precisely assembled onto different target substrate such as glass, plastic, ceramic and silicon. This method is known for
increasing functionality and improving efficiency.
Micro transfer printer 1003 from Xdisplay was installed in year 2022 and placed in cleanroom F-4.
Equipment info in [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=503 Lab Manager] - '''requires login'''
[[Image:Equipment.jpg|500x500px|thumb|The Micro transfer printer is placed in F-4]]
[[Image:MTP image.jpg|1000px|thumb|left|Steps involved in pick and print]]
<br clear="all" />


==Equipment performance and process related parameters==


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{|border="1" cellspacing="1" cellpadding="10" style="text-align:left;"


=Stylus Profiler: Dektak150=
!style="background:silver; color:black;" width="60"|Purpose
|style="background:WhiteSmoke; color:black" colspan="2"|
Pick and Print


[[Image:DUV_wafers.jpg|500px|frameless|right|]]
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!style="background:silver; color:black;" width="60"|Material handling configuration
|style="background:WhiteSmoke; color:black" colspan="2"|
Manual


TextTextTextTextTextText
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TextTextText
!style="background:silver; color:black;" width="60"|Stage max. travel time (X x Y mm)
|style="background:WhiteSmoke; color:black" colspan="2"|
300 x 300


TextTextTextTextText
|-
TextTextText
!style="background:silver; color:black;" width="60" |Source size (mm)
|style="background:WhiteSmoke; color:black" colspan="2"|
upto 150


|-
!style="background:silver; color:black;" width="60"|Target size (mm)
|style="background:WhiteSmoke; color:black" colspan="2"|
upto 150


'''[https://www.youtube.com/playlist?list=PLjWVU97LayHAiCabstMfAUeeWyQoQI_cV Training videos]'''
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!style="background:silver; color:black;" width="60"|Alignment accuracy (single post stamp)
|style="background:WhiteSmoke; color:black" colspan="2"|
<0.5um


Equipment info in [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=464 LabManager] - '''requires login'''
|-
!style="background:silver; color:black" align="left" rowspan="3"|Allowed material
|style="background:WhiteSmoke; color:black" colspan="2"|
All cleanroom materials


TextTextTextTextTextText
TextText
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==Equipment performance and process related parameters==
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Latest revision as of 11:46, 8 September 2023

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Micro Transfer Printer

Micro transfer printing is an emerging technique to transfer diverse and non-native components from source substrate to target substrate. Micro transfer printing is best for achieving heterogeneous integration, where micro-components from different sources are picked up by polymer stamp and precisely assembled onto different target substrate such as glass, plastic, ceramic and silicon. This method is known for increasing functionality and improving efficiency.

Micro transfer printer 1003 from Xdisplay was installed in year 2022 and placed in cleanroom F-4.

Equipment info in Lab Manager - requires login

The Micro transfer printer is placed in F-4
Steps involved in pick and print


Equipment performance and process related parameters

Purpose

Pick and Print

Material handling configuration

Manual

Stage max. travel time (X x Y mm)

300 x 300

Source size (mm)

upto 150

Target size (mm)

upto 150

Alignment accuracy (single post stamp)

<0.5um

Allowed material

All cleanroom materials