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'''Feedback to this page''': '''[mailto:e-beam@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php?title=Specific_Process_Knowledge/Lithography click here]'''
'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/EBeamLithography/BEAMER click here]'''
 
Content and illustration by Thomas Pedersen, DTU Nanolab unless otherwise noted.


=Beamer guide=
=Beamer guide=
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For a more in depth look at Beamer please refer to GenISys own [https://www.genisys-gmbh.com/in-action.html learning material found here.]
For a more in depth look at Beamer please refer to GenISys own [https://www.genisys-gmbh.com/in-action.html learning material found here.]
Currently the content below is a mix of Beamer 6 and 7, we are working towards changing it all to Beamer 7. The difference is mostly visual though.


==Beamer nodes==
==Beamer nodes==
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===Visual-Job===
===Visual-Job===
Visual Job is essentially a graphical interface where one can setup a job consisting of multiple patterns. After setup Visual Job vil write the corresponding SDF and JDF files. A short video guide to [https://youtu.be/Mi_HimB0Xa8?si=7WemvXTKJMGLY2jb Visual Job is available here.] Notice that the video is from Beamer 6.2, there is only a few minor changes in Beamer 7.


===PEC===
===PEC===