Specific Process Knowledge/Lithography/EBeamLithography/BEAMER: Difference between revisions
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'''Feedback to this page''': '''[mailto: | '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/EBeamLithography/BEAMER click here]''' | ||
Content and illustration by Thomas Pedersen, DTU Nanolab unless otherwise noted. | |||
=Beamer guide= | =Beamer guide= | ||
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For a more in depth look at Beamer please refer to GenISys own [https://www.genisys-gmbh.com/in-action.html learning material found here.] | For a more in depth look at Beamer please refer to GenISys own [https://www.genisys-gmbh.com/in-action.html learning material found here.] | ||
Currently the content below is a mix of Beamer 6 and 7, we are working towards changing it all to Beamer 7. The difference is mostly visual though. | |||
==Beamer nodes== | ==Beamer nodes== | ||
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''Ignore text, Load Text, Text as Polygon:'' Either ignores text objects, imports them as text objects or converts them to polygons. Notice that text defined in CleWin is not saved as text objects but as polygons when saving the file as GDS and hence this option is not necesarry if the design originates from CleWin. | ''Ignore text, Load Text, Text as Polygon:'' Either ignores text objects, imports them as text objects or converts them to polygons. Notice that text defined in CleWin is not saved as text objects but as polygons when saving the file as GDS and hence this option is not necesarry if the design originates from CleWin. | ||
''Generic curve:'' Allows the detection of | ''Generic curve:'' Allows the detection of curved structures such as arcs or circles. Opens the "Approximation accuracy" field where the user can input the highest allowable deviation from the drawn polygonal structure. If curved elements are found Beamer will determine the right amount of vertices to fit the curved structure. | ||
''Keep Order of Elements:'' Preserves the order in which elements are drawn/listed in the import file. | ''Keep Order of Elements:'' Preserves the order in which elements are drawn/listed in the import file. | ||
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===Visual-Job=== | ===Visual-Job=== | ||
Visual Job is essentially a graphical interface where one can setup a job consisting of multiple patterns. After setup Visual Job vil write the corresponding SDF and JDF files. A short video guide to [https://youtu.be/Mi_HimB0Xa8?si=7WemvXTKJMGLY2jb Visual Job is available here.] Notice that the video is from Beamer 6.2, there is only a few minor changes in Beamer 7. | |||
===PEC=== | ===PEC=== | ||