Specific Process Knowledge/Thin film deposition/ALD Picosun R200/ALD multilayers: Difference between revisions
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'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Thin_film_deposition/ALD_Picosun_R200/ALD_multilayers click here]''' | '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Thin_film_deposition/ALD_Picosun_R200/ALD_multilayers click here]''' | ||
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This page describes non-standart recipes including multilayers structures. They were the first test recipes on the ALD-1 to test the tool functionality and can be used as inspiration. | This page describes non-standart recipes including multilayers structures. They were the first test recipes on the ALD-1 to test the tool functionality and can be used as inspiration. | ||
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==Low temperature deposition of Al<sub>2</sub>O<sub>3</sub>== | ==Low temperature deposition of Al<sub>2</sub>O<sub>3</sub>== | ||
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<gallery caption="" widths=" | <gallery caption="" widths="400px" heights="350px" perrow="2"> | ||
image:Al2O3_LT_Thickness.JPG| Measured thickness distribution across 100 mm wafer. | image:Al2O3_LT_Thickness.JPG| Measured thickness distribution across 100 mm wafer. | ||
image:Al2O3_LT_RI.JPG| Measured refractive index distribution across 100 mm wafer. | image:Al2O3_LT_RI.JPG| Measured refractive index distribution across 100 mm wafer. | ||
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<gallery caption="" widths=" | <gallery caption="" widths="400px" heights="350px" perrow="2"> | ||
image:TiO2_LT_Thickness.JPG| Measured thickness distribution across 100 mm wafer. | image:TiO2_LT_Thickness.JPG| Measured thickness distribution across 100 mm wafer. | ||
image:TiO2_LT_RI.JPG| Measured refractive index distribution across 100 mm wafer. | image:TiO2_LT_RI.JPG| Measured refractive index distribution across 100 mm wafer. | ||
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<b>Evgeniy Shkondin, DTU Danchip, 2014-2016.</b> | <b>Evgeniy Shkondin, DTU Nanolab (former DTU Danchip), 2014-2016.</b> | ||
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<gallery caption="" widths=" | <gallery caption="" widths="400px" heights="350px" perrow="2"> | ||
image:XPS_depth_Al_10_AL.jpg| Al 2p signal multilayers. | image:XPS_depth_Al_10_AL.jpg| Al 2p signal multilayers. | ||
image:XPS_depth_Al_10_Ti.jpg| Ti 2p signal multilayers. | image:XPS_depth_Al_10_Ti.jpg| Ti 2p signal multilayers. | ||
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<b>Evgeniy Shkondin, DTU Danchip, 2014-2016.</b> | <b>Evgeniy Shkondin, DTU Nanolab (former DTU Danchip), 2014-2016.</b> | ||
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<b>Evgeniy Shkondin, DTU Danchip, 2014-2016.</b> | <b>Evgeniy Shkondin, DTU Nanolab (former DTU Danchip), 2014-2016.</b> | ||
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