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{{cc-nanolab}}
'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/PECVD  click here]''' <br>
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[[Category: Equipment|Thin film PECVD]]
[[Category: Thin Film Deposition|PECVD]]
{{CC1}}


==PECVD Plasma Enhanced Chemical Vapor Deposition==
==PECVD Plasma Enhanced Chemical Vapor Deposition==
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*[[/Pre-release tests on PECVD4|Pre-release tests on PECVD4]]
*[[/Pre-release tests on PECVD4|Pre-release tests on PECVD4]]


*[[Specific Process Knowledge/Thin film deposition/Deposition of Silicon/Si deposition using PECVD|Si deposition using PECVD3]]
*[[Specific Process Knowledge/Thin film deposition/Deposition of Silicon/Si deposition using PECVD|Si deposition using PECVD3]]<br />
 
 
 
 
 
 
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==Overview of the performance of PECVD thin films and some process related parameters==
==Overview of the performance of PECVD thin films and some process related parameters==


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|style="background:LightGrey; color:black"|Film thickness
|style="background:LightGrey; color:black"|Film thickness
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*~10nm - 30µm
*~10nm - 30µm (recipe dependant)
|
|
*~10nm - 30µm
*~10nm - 30µm (recipe dependant)
|-
|-
|style="background:LightGrey; color:black"|Index of refraction
|style="background:LightGrey; color:black"|Index of refraction
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*NH<sub>3</sub>:0-1000 sccm
*NH<sub>3</sub>:0-1000 sccm
*N<sub>2</sub>:0-3000 sccm
*N<sub>2</sub>:0-3000 sccm
*GeH<sub>4</sub>:0-6.00 sccm
*5%PH<sub>3</sub>:0-60 sccm
*5%PH<sub>3</sub>:0-60 sccm
*3%B<sub>2</sub>H<sub>6</sub>:0-1000 sccm
*3%B<sub>2</sub>H<sub>6</sub>:0-200 sccm
|
|
*SiH<sub>4</sub>:0-60 sccm
*SiH<sub>4</sub>:0-60 sccm
*N<sub>2</sub>O:0-3000 sccm
*N<sub>2</sub>O:0-3000 sccm
*NH<sub>3</sub>:0-400 sccm
*NH<sub>3</sub>:0-287 sccm
*N<sub>2</sub>:0-3000 sccm
*N<sub>2</sub>:0-3000 sccm
*Ar:0-1000 sccm
*Ar:0-1415 sccm
*He: 200sccm
*5%PH<sub>3</sub>:0-100 sccm
*5%PH<sub>3</sub>:0-100 sccm
*3%B<sub>2</sub>H<sub>6</sub>:0-850 sccm
*3%B<sub>2</sub>H<sub>6</sub>:0-270 sccm
|-
|-
!style="background:silver; color:black" align="left" rowspan="3" valign="top" |Substrates
!style="background:silver; color:black" align="left" rowspan="3" valign="top" |Substrates
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