Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/OldConfig: Difference between revisions
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[[Category: Equipment |Etch DRIE]] | [[Category: Equipment |Etch DRIE]] | ||
[[Category: Etch (Dry) Equipment|DRIE]] | [[Category: Etch (Dry) Equipment|DRIE]] | ||
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=== Past configurations === | === Past configurations === | ||
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: 2021 Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics, 39(3), [032201] | : 2021 Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics, 39(3), [032201] | ||
: https://doi.org/10.1116/6.0000922 | : https://doi.org/10.1116/6.0000922 | ||