Jump to content

Specific Process Knowledge/Characterization/XPS/XPS Depth profiling: Difference between revisions

Jmli (talk | contribs)
No edit summary
Jmli (talk | contribs)
No edit summary
 
(3 intermediate revisions by the same user not shown)
Line 3: Line 3:
<!-- Page reviewed 8/5-2023 jmli -->
<!-- Page reviewed 8/5-2023 jmli -->
{{Author-jmli1}}
{{Author-jmli1}}
<!--Checked for updates on 4/9-2025 - ok/jmli -->


=Depth profiling=
=Depth profiling=
Line 18: Line 19:
* Polysilicon
* Polysilicon


[[File:profile sandwich 3.PNG|700px]]
[[File:profile sandwich 3.PNG|700px|{{photo1}}]]


In the spectra required to make such a depth profile, one can distinguish the various chemical environments of silicon depending on whether it is bonded to:
In the spectra required to make such a depth profile, one can distinguish the various chemical environments of silicon depending on whether it is bonded to: