Specific Process Knowledge/Lithography/EBeamLithography/eLINE: Difference between revisions
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[[Image:eLINE-Plus.png| | =Raith eLINE Plus system= | ||
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The system was installed in the cleanroom in May 2022. As we get more familiar with the tool this page will be populated with relevant process information. | The system was installed in the cleanroom in May 2022. As we get more familiar with the tool this page will be populated with relevant process information. | ||
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== System overview == | == System overview == | ||
[[File:RaithHolders.jpg|600px|thumb|left|4 inch wafer holder and 100 mm Universal Sample Holder (USH)]] | |||
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[[File:RaithHolders.jpg| | |||
The system is a dual use SEM and EBL exposure tool. For SEM applications the most notable difference from our other SEM's is the automation functionality that allows users to link a design to a substrate and simply from the design define areas to image and the tool will then image those areas without further user input. Once an imaging routine has been setup several hundred images can be acquired per hour. For a brief introduction to this feature see more [https://youtu.be/YoZF_6FeVb4 in this video.] | The system is a dual use SEM and EBL exposure tool. For SEM applications the most notable difference from our other SEM's is the automation functionality that allows users to link a design to a substrate and simply from the design define areas to image and the tool will then image those areas without further user input. Once an imaging routine has been setup several hundred images can be acquired per hour. For a brief introduction to this feature see more [https://youtu.be/YoZF_6FeVb4 in this video.] | ||
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Currently two holders are available, a 4" wafer holder and a 100 mm Universal Sample Holder (USH) for substrates up to about 75x75 mm. Chips can be clamped on either of the 8 chip clamps on the USH. The sample holders will rest on three ceramic balls on the stage, each ceramic ball fits into one of the kinematic mounts of the sample holder. The kinematic mounts are adjusted to keep the sample holder as level as possible. When handling the sample holders it is important not to touch the kinematic mounts. | Currently two holders are available, a 4" wafer holder and a 100 mm Universal Sample Holder (USH) for substrates up to about 75x75 mm. Chips can be clamped on either of the 8 chip clamps on the USH. The sample holders will rest on three ceramic balls on the stage, each ceramic ball fits into one of the kinematic mounts of the sample holder. The kinematic mounts are adjusted to keep the sample holder as level as possible. When handling the sample holders it is important not to touch the kinematic mounts. | ||
==Dose information== | ==Dose information== | ||