Specific Process Knowledge/Back-end processing/Disco Saw: Difference between revisions
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In general it is ''not allowed'' to bring back your samples into the Cleanroom. You need approval from DTU Nanolab staff to do this. Your samples have to be thoroughly cleaned in the gowning area and get a Piranha cleaning. You will only be allowed to use a limited number of tools for the processing after dicing. | In general it is ''not allowed'' to bring back your samples into the Cleanroom. You need approval from DTU Nanolab staff to do this, follow the instructions [[Specific Process Knowledge/Wafer cleaning/Bring samples into cleanroom|here]] to apply for approval. Your samples have to be thoroughly cleaned in the gowning area and get a Piranha cleaning. You will only be allowed to use a limited number of tools for the processing after dicing. | ||
[[File:IMG_20230228_112922.jpg|thumb|800px|Dicers positioned on 1. floor bldg 346 room 157]] | [[File:IMG_20230228_112922.jpg|thumb|800px|Dicers positioned on 1. floor bldg 346 room 157]] | ||
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[[Image:IMG 20230228 113020.jpg|thumb|Wafer mounter for DAD 3241]] | [[Image:IMG 20230228 113020.jpg|thumb|Wafer mounter for DAD 3241]] | ||
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[[Image:IMG 20230228 113101.jpg|thumb|600px|left|Wafer mounting table for DAD 321]] | |||
[[Image:IMG 20230228 113035.jpg|thumb|600px|UV curing/Tape release]] | |||
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