Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300/IBE Au etch: Difference between revisions

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 '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/IBE⁄IBSD_Ionfab_300/IBE_Au_etch click here]'''
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 !style="background:silver; color:black" align="left" valign="top"|Etch rate uniformity
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-*<+-2%
+*<&plusmn;2%
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-*+-(0.2% +-0.2%)
+*&plusmn;(0.2% +-0.2%)
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 !style="background:silver; color:black" align="left" valign="top"|Reproducibility
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-*<+-2%
+*<&plusmn;2%
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-*+-0.9%
+*&plusmn;0.9%
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 !style="background:silver; color:black" align="left" valign="top"|Selectivity (Au etch rate/ZEP etch rate)