Specific Process Knowledge/Back-end processing/Laser Micromachining Tool/fluence: Difference between revisions
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== Fluence definition == | |||
The fluence produces by a laser is, by definition, the energy delivered by a laser pulse (<math>E_{pulse}</math>) per surface unit (<math>A</math>) and it is given in J/cm2. | The fluence produces by a laser is, by definition, the energy delivered by a laser pulse (<math>E_{pulse}</math>) per surface unit (<math>A</math>) and it is given in J/cm2. |
Latest revision as of 12:46, 6 February 2023
Unless anything else is stated, everything on this page, text and pictures are made by DTU Nanolab.
All links to Kemibrug (SDS) and Labmanager Including APV and QC requires login.
Fluence definition
The fluence produces by a laser is, by definition, the energy delivered by a laser pulse () per surface unit () and it is given in J/cm2.
The function is defined as:
Where (average power) is measured with the laser sensor power measurement (see manual,section 5.3) and the repetion rate () is set in the parameter file under " laser frequency".
The fluence is therefore determinated as such:
The area () can be determinate with the theoretical min spot diameter (1/e2), available here
Fluence results measurement
The results below have been calculated with the theoretical spot size provided by 3D Micromac.