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{{:Specific Process Knowledge/Lithography/authors_generic}}
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'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Lithography/Coaters/Spin_Coater:_Gamma_UV_processing click here]'''
'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Lithography/Coaters/Spin_Coater:_Gamma_UV_processing click here]'''
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*[http://labmanager.dtu.dk/d4Show.php?id=5123&mach=359 The QC procedure for Spin Coater: Gamma UV] - '''requires login'''<br>
*[https://labmanager.dtu.dk/d4Show.php?id=5123&mach=359 The QC procedure for Spin Coater: Gamma UV] - '''requires login'''<br>
*[http://labmanager.dtu.dk/view_binary.php?fileId=4211 The newest QC data for Spin Coater: Gamma UV] - '''requires login'''
*[https://labmanager.dtu.dk/view_binary.php?type=data&mach=359 The newest QC data for Spin Coater: Gamma UV] - '''requires login'''
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*[http://labmanager.dtu.dk/d4Show.php?id=5123&mach=359 The QC procedure for Spin Coater: Gamma UV] - '''requires login'''<br>
*[https://labmanager.dtu.dk/d4Show.php?id=5123&mach=359 The QC procedure for Spin Coater: Gamma UV] - '''requires login'''<br>
*[http://labmanager.dtu.dk/view_binary.php?fileId=4211 The newest QC data for Spin Coater: Gamma UV] - '''requires login'''
*[https://labmanager.dtu.dk/view_binary.php?type=data&mach=359 The newest QC data for Spin Coater: Gamma UV] - '''requires login'''
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|taran
|taran
|4" wafer, no HMDS. 9 points on one wafer, exclusion zone 5mm
|4" wafer, no HMDS. 9 points on one wafer, exclusion zone 5mm
|-
|-style="background:WhiteSmoke; color:black"
|Silicon with native oxide
|4.24 µm
|0.5%
|7/1 2025
|taran
|Old sequence (proximity bake and only 60s by mistake).
4" wafer, with HMDS. 9 points on one wafer, exclusion zone 5mm
|-
|-style="background:WhiteSmoke; color:black"
|Silicon with native oxide
|3.99 µm
|0.3%
|7/1 2025
|taran
|New sequence with contact bake.
4" wafer, with HMDS. 9 points on one wafer, exclusion zone 5mm
|}
|}


==AZ nLOF 2020 coating==
==AZ nLOF 2020 coating==
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