Specific Process Knowledge/Etch/DRIE-Pegasus/StandardRecipes: Difference between revisions
Appearance
No edit summary |
No edit summary |
||
| Line 3: | Line 3: | ||
<!--Checked for updates on 30/7-2018 - ok/jmli --> | <!--Checked for updates on 30/7-2018 - ok/jmli --> | ||
<!--Checked for updates on 5/10-2020 - ok/jmli --> | <!--Checked for updates on 5/10-2020 - ok/jmli --> | ||
<!--Checked for updates on 4/9-2025 - ok/jmli --> | |||
== Overview of the standard processes: Processes A, B, C, D and SOI == | == Overview of the standard processes: Processes A, B, C, D and SOI == | ||