Specific Process Knowledge/Lithography/Resist/DUVresist: Difference between revisions

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	===DUV resist overview===		===DUV resist overview===
	The spinning process will be performed by the customer together with the Photolith group of Nanolab. In case you would like to do DUV lithography please contact Lithography team, who will consult you and run your wafers together with you.		The spinning process will be performed by the customer together with the Photolith group of Nanolab. In case you would like to do DUV lithography, please contact Lithography team, who will consult you and run your wafers together with you.