Specific Process Knowledge/Thermal Process/BCB Curing Oven: Difference between revisions
No edit summary |
|||
| (One intermediate revision by one other user not shown) | |||
| Line 8: | Line 8: | ||
[[image:BCB oven.jpeg|350x350px|right|thumb|The BCB Curing Oven. Positioned in room Cx1/ Photo: DTU Nanolab internal]] | [[image:BCB oven.jpeg|350x350px|right|thumb|The BCB Curing Oven. Positioned in room Cx1/ Photo: DTU Nanolab internal]] | ||
The BCB Curing Oven is mainly used for curing of BCB (bisbenzocyclobutene) and for alloying of some metals in a nitrogen atmosphere. | The BCB Curing Oven is mainly used for curing of BCB (bisbenzocyclobutene, cyclotene®) and for alloying of some metals in a nitrogen atmosphere. | ||
During processing the oven is rapidly heated by use of eight halogen lamps situated below the sample. The maximum allowed temperature is 450 <sup>o</sup>C. | During processing the oven is rapidly heated by use of eight halogen lamps situated below the sample. The maximum allowed temperature is 450 <sup>o</sup>C. | ||
| Line 111: | Line 111: | ||
*Quartz | *Quartz | ||
*Resist (prebaked) | *Resist (prebaked) | ||
*Metals | *Metals on Material list 1, 2 and 3 (see the cross contamination information in LabManager) | ||
|- | |- | ||
|} | |} | ||