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Specific Process Knowledge/Etch/Overview of chemicals: Difference between revisions

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'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/Overview_of_chemicals click here]'''
{{cc-nanolab}}


'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/Overview_of_chemicals click here]'''
<br>
<br>
=<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]]=
=<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]]=
On this page, an overview over the standard chemicals we have in the Cleanroom, as well as a link to kemibrug.dk for those chemicals. You will also be able to see if there is any change in the chemicals we have or something else about them in the comments.
''All links to kemibrug.dk require a DTU login.''


{| border="2" cellspacing="0" cellpadding="10"  
{| border="2" cellspacing="0" cellpadding="10"  
Line 37: Line 43:
!style="background:silver; color:black;" align="left"|AR-600-546 Developer
!style="background:silver; color:black;" align="left"|AR-600-546 Developer
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhERkZLSEtGS1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.]
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhERkZLSEtGS1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.]
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specified
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specified
!style="background:WhiteSmoke; color:black"|Comment
!style="background:WhiteSmoke; color:black"|Comment
|-
|-
Line 102: Line 108:
|-
|-
!style="background:silver; color:black;" align="left"|Chrome etch 18
!style="background:silver; color:black;" align="left"|Chrome etch 18
!style="background:LightGrey; color:black;"|Cas Nr.  
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES0hHR0pMS1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.]
no nr.  
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific  
!style="background:LightGrey; color:black;"|not specific  
Line 109: Line 114:
|-
|-
!style="background:silver; color:black;" align="left"|Developer MIBK Methylisobutylketon 4L
!style="background:silver; color:black;" align="left"|Developer MIBK Methylisobutylketon 4L
!style="background:LightGrey; color:black;"|Cas Nr.  
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETE5FSkVMS1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 108-10-1]
108-10-1
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|VLSI
!style="background:LightGrey; color:black;"|VLSI
Line 116: Line 120:
|-
|-
!style="background:silver; color:black;" align="left"|DUV42S-6,4 L ultra nowpak W/Closure lid
!style="background:silver; color:black;" align="left"|DUV42S-6,4 L ultra nowpak W/Closure lid
!style="background:LightGrey; color:black;"|Cas Nr.  
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhERkdNR0tITVRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.]
no nr.  
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Aicello
!style="background:LightGrey; color:black;"|Aicello
Line 123: Line 126:
|-
|-
!style="background:silver; color:black;" align="left"|Ethanol
!style="background:silver; color:black;" align="left"|Ethanol
!style="background:LightGrey; color:black;"|Cas Nr.  
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETUpFRklGS1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 64-17-5]
64-17-5  
!style="background:LightGrey; color:black;"|99,9%-100%
!style="background:LightGrey; color:black;"|99,9%-100%
!style="background:LightGrey; color:black;"|VLSI  
!style="background:LightGrey; color:black;"|VLSI  
Line 130: Line 132:
|-
|-
!style="background:silver; color:black;" align="left"|Hydrofluoric acid buffer (BHF/BOE)
!style="background:silver; color:black;" align="left"|Hydrofluoric acid buffer (BHF/BOE)
!style="background:LightGrey; color:black;"|Cas Nr.  
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETUdJSUpNS1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.]
no nr.
!style="background:LightGrey; color:black;"|12,5%
!style="background:LightGrey; color:black;"|12,5%
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
Line 137: Line 138:
|-
|-
!style="background:silver; color:black;" align="left"|Hydrofluoric acid buffer (BHF/BOE W/wetting agent)
!style="background:silver; color:black;" align="left"|Hydrofluoric acid buffer (BHF/BOE W/wetting agent)
!style="background:LightGrey; color:black;"|Cas Nr.  
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETUZKS01LSlRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.]
no nr.
!style="background:LightGrey; color:black;"|12,5%
!style="background:LightGrey; color:black;"|12,5%
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
Line 144: Line 144:
|-
|-
!style="background:silver; color:black;" align="left"|Hexamethyldisilasan
!style="background:silver; color:black;" align="left"|Hexamethyldisilasan
!style="background:LightGrey; color:black;"|Cas Nr.  
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhER0VFRkxJVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. 999-97-3]
999-97-3
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
Line 151: Line 150:
|-
|-
!style="background:silver; color:black" align="left" valign="top" rowspan="4"|HYDROFLUORIC ACID (HF)
!style="background:silver; color:black" align="left" valign="top" rowspan="4"|HYDROFLUORIC ACID (HF)
!style="background:LightGrey; color:black;"|Cas Nr.  
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETUhLSkpITVRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.]
no nr.
|style="background:LightGrey; color:black"|1%
|style="background:LightGrey; color:black"|1%
!style="background:LightGrey; color:black;"|VLSI
!style="background:LightGrey; color:black;"|VLSI
|style="background:WhiteSmoke; color:black"|Comment
|style="background:WhiteSmoke; color:black"|Comment
|-
|-
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETUhLSkhLTlRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. No nr.]
no nr.
|style="background:LightGrey; color:black"|10%
|style="background:LightGrey; color:black"|10%
!style="background:LightGrey; color:black;"|VLSI
!style="background:LightGrey; color:black;"|VLSI
|style="background:WhiteSmoke; color:black"|Comment
|style="background:WhiteSmoke; color:black"|Will be removed ones we no longer have any in storage
|-  
|-  
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETUhLSktOTFRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.]
no nr.
|style="background:LightGrey; color:black"|40%
|style="background:LightGrey; color:black"|40%
!style="background:LightGrey; color:black;"|EMSURE® ISO for analysis
!style="background:LightGrey; color:black;"|EMSURE® ISO for analysis
|style="background:WhiteSmoke; color:black"|Comment
|style="background:WhiteSmoke; color:black"|Comment
|-
|-
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES0pJTEtJR1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.]
no nr.
|style="background:LightGrey; color:black"|50%
|style="background:LightGrey; color:black"|50%
!style="background:LightGrey; color:black;"|VLSI
!style="background:LightGrey; color:black;"|VLSI
Line 176: Line 171:
|-
|-
!style="background:silver; color:black;" align="left"|Hydrochloric acid
!style="background:silver; color:black;" align="left"|Hydrochloric acid
!style="background:LightGrey; color:black;"|Cas Nr. 7647-01-0
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETElITUpITlRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 7647-01-0]
!style="background:LightGrey; color:black;"|37%
!style="background:LightGrey; color:black;"|37%
!style="background:LightGrey; color:black;"|VLSI
!style="background:LightGrey; color:black;"|VLSI
Line 182: Line 177:
|-
|-
!style="background:silver; color:black;" align="left"|Hydrogenperoxid
!style="background:silver; color:black;" align="left"|Hydrogenperoxid
!style="background:LightGrey; color:black;"|Cas Nr. 7722-84-1
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhESUlKRUVISVRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 7722-84-1]
!style="background:LightGrey; color:black;"|31%
!style="background:LightGrey; color:black;"|31%
!style="background:LightGrey; color:black;"|VLSI
!style="background:LightGrey; color:black;"|VLSI
Line 188: Line 183:
|-
|-
!style="background:silver; color:black;" align="left"|KRF m230Y 6cP Gal
!style="background:silver; color:black;" align="left"|KRF m230Y 6cP Gal
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhESkpGSk1GSVRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.]
no nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
Line 195: Line 189:
|-
|-
!style="background:silver; color:black;" align="left"|KRF M35G 27cP Gal
!style="background:silver; color:black;" align="left"|KRF M35G 27cP Gal
!style="background:LightGrey; color:black;"|Cas Nr.  
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhESkpGSklKRlRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.]
no nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
Line 202: Line 195:
|-
|-
!style="background:silver; color:black;" align="left"|Microposit Remover 1165  
!style="background:silver; color:black;" align="left"|Microposit Remover 1165  
!style="background:LightGrey; color:black;"|Cas Nr.  
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES0VOSUpFVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. no nr.]
no nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:LightGrey; color:black;"|Grade
Line 209: Line 201:
|-
|-
!style="background:silver; color:black;" align="left"|Nitric acid  
!style="background:silver; color:black;" align="left"|Nitric acid  
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETEpITkVGTFRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 231-714-2]
231-714-2
!style="background:LightGrey; color:black;"|69%
!style="background:LightGrey; color:black;"|69%
!style="background:LightGrey; color:black;"|VLSI
!style="background:LightGrey; color:black;"|VLSI
Line 216: Line 207:
|-
|-
!style="background:silver; color:black;" align="left"|Ortho-Phosphoric acid
!style="background:silver; color:black;" align="left"|Ortho-Phosphoric acid
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETElMTEdOS1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 7664-38-2]
7664-38-2
!style="background:LightGrey; color:black;"|85%
!style="background:LightGrey; color:black;"|85%
!style="background:LightGrey; color:black;"|VLSI
!style="background:LightGrey; color:black;"|VLSI
Line 223: Line 213:
|-
|-
!style="background:silver; color:black;" align="left"|Potassium hydroxide solution
!style="background:silver; color:black;" align="left"|Potassium hydroxide solution
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETE1IS0xIRVRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 1310-58-3]
1310-58-3
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Selectipur
!style="background:LightGrey; color:black;"|Selectipur
!style="background:WhiteSmoke; color:black"|Comment
!style="background:WhiteSmoke; color:black"|Comment
|-
|-
!style="background:silver; color:black;" align="left"|Propanol
!style="background:silver; color:black;" align="left"|Isoropanol
!style="background:LightGrey; color:black;"|Cas Nr.  
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETEhITUlHRlRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 67-63-0]
67-63-0
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|VLSi
!style="background:LightGrey; color:black;"|VLSi
Line 237: Line 225:
|-
|-
!style="background:silver; color:black;" align="left"|SU-8 2005
!style="background:silver; color:black;" align="left"|SU-8 2005
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES0lFRUVJVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. no .nr]
no .nr
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
Line 244: Line 231:
|-
|-
!style="background:silver; color:black;" align="left"|SU-8 2035
!style="background:silver; color:black;" align="left"|SU-8 2035
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES0lFRUVJVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. no .nr]
no nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
Line 251: Line 237:
|-
|-
!style="background:silver; color:black;" align="left"|SU-8 2075
!style="background:silver; color:black;" align="left"|SU-8 2075
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES0lFRUVJVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. no .nr]
no nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
Line 258: Line 243:
|-
|-
!style="background:silver; color:black;" align="left"|SU-8 Developer (Mr-dev 600)
!style="background:silver; color:black;" align="left"|SU-8 Developer (Mr-dev 600)
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETkdITklFVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. no nr.]
no nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
Line 265: Line 249:
|-
|-
!style="background:silver; color:black;" align="left"|SU-8 Thinner
!style="background:silver; color:black;" align="left"|SU-8 Thinner
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES0dLRktGVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. no nr.]
no nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
Line 272: Line 255:
|-
|-
!style="background:silver; color:black;" align="left"|Sulfamic acid  
!style="background:silver; color:black;" align="left"|Sulfamic acid  
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhESklISUVLS1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 5329-14-6]
5329-14-6
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Alkamlimetry
!style="background:LightGrey; color:black;"|Alkamlimetry
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|-
|-
!style="background:silver; color:black;" align="left"|Sulfuric acid  
!style="background:silver; color:black;" align="left"|Sulfuric acid  
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETElMTk1GTFRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 7664-93-9]
7664-93-9
!style="background:LightGrey; color:black;"|95%-97%
!style="background:LightGrey; color:black;"|95%-97%
!style="background:LightGrey; color:black;"|VLSI
!style="background:LightGrey; color:black;"|VLSI
Line 286: Line 267:
|-
|-
!style="background:silver; color:black;" align="left"|TI spray  
!style="background:silver; color:black;" align="left"|TI spray  
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETUlHSE1NTFRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.]
no nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
Line 293: Line 273:
|-
|-
!style="background:silver; color:black;" align="left"|ZED N50
!style="background:silver; color:black;" align="left"|ZED N50
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhESkpOTUlMVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. no nr.]
no nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
Line 300: Line 279:
|-
|-
!style="background:silver; color:black;" align="left"|Triton x-100
!style="background:silver; color:black;" align="left"|Triton x-100
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETEdORUlJRlRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 9002-93-1]
9002-93-1
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|not specific

Latest revision as of 16:06, 2 June 2025

The content on this page, including all images and pictures, was created by DTU Nanolab staff, unless otherwise stated.

Feedback to this page: click here

THIS PAGE IS UNDER CONSTRUCTION

On this page, an overview over the standard chemicals we have in the Cleanroom, as well as a link to kemibrug.dk for those chemicals. You will also be able to see if there is any change in the chemicals we have or something else about them in the comments.

All links to kemibrug.dk require a DTU login.

Chemical Cas Nr. Concentration Grade Comment
Acetone Cas Nr. 67-64-1 99,8%-100% VLSi
Ammoniumhydroxyd Cas Nr. 1336-21-6 28% VLSI Comment
Ammoniumperoxodisulfat Cas Nr. 7727-54-0 98%-99,1% Analyse Comment
Anisole Anhydrous Cas Nr. 100-66-3 99,7% GPR Comment
AR-600-546 Developer Cas Nr. no nr. not specified not specified Comment
AR-600-71 Remover Cas Nr. no nr. not specific not specific Comment
AR-6200.09 E-beam resist Cas Nr. no nr. not specific not specific Comment
AZ 351B Developer Cas Nr. no nr. not specific not specific Comment
AZ 4562 Photoresist Cas Nr. no nr. not specific not specific Comment
AZ 5214E Photoresist Cas Nr. no nr. not specific not specific Comment
AZ 726MIF developer Cas Nr. no nr. not specific not specific Comment
AZ 726MIF developer (Tromle) Cas Nr. no nr. not specific not specific Comment
AZ MiR 701 (29CPS) Photoresist Cas Nr. No nr. not specific not specific Comment
AZ nLOF 2020 Photoresist Cas Nr. no nr. not specific not specific Comment
Boric Acid powder Cas Nr. 10043-35-3 not specific Analytic Comment
Chrome etch 18 Cas Nr. no nr. not specific not specific Comment
Developer MIBK Methylisobutylketon 4L Cas Nr. 108-10-1 not specific VLSI Comment
DUV42S-6,4 L ultra nowpak W/Closure lid Cas Nr. no nr. not specific Aicello Comment
Ethanol Cas Nr. 64-17-5 99,9%-100% VLSI Comment
Hydrofluoric acid buffer (BHF/BOE) Cas Nr. no nr. 12,5% not specific Comment
Hydrofluoric acid buffer (BHF/BOE W/wetting agent) Cas Nr. no nr. 12,5% not specific Comment
Hexamethyldisilasan Cas Nr. 999-97-3 not specific not specific Comment
HYDROFLUORIC ACID (HF) Cas Nr. no nr. 1% VLSI Comment
Cas Nr. No nr. 10% VLSI Will be removed ones we no longer have any in storage
Cas Nr. no nr. 40% EMSURE® ISO for analysis Comment
Cas Nr. no nr. 50% VLSI Comment
Hydrochloric acid Cas Nr. 7647-01-0 37% VLSI Comment
Hydrogenperoxid Cas Nr. 7722-84-1 31% VLSI Comment
KRF m230Y 6cP Gal Cas Nr. no nr. not specific not specific Comment
KRF M35G 27cP Gal Cas Nr. no nr. not specific not specific Comment
Microposit Remover 1165 Cas Nr. no nr. not specific Grade Comment
Nitric acid Cas Nr. 231-714-2 69% VLSI Comment
Ortho-Phosphoric acid Cas Nr. 7664-38-2 85% VLSI Comment
Potassium hydroxide solution Cas Nr. 1310-58-3 not specific Selectipur Comment
Isoropanol Cas Nr. 67-63-0 not specific VLSi Comment
SU-8 2005 Cas Nr. no .nr not specific not specific Comment
SU-8 2035 Cas Nr. no .nr not specific not specific Comment
SU-8 2075 Cas Nr. no .nr not specific not specific Comment
SU-8 Developer (Mr-dev 600) Cas Nr. no nr. not specific not specific Comment
SU-8 Thinner Cas Nr. no nr. not specific not specific Comment
Sulfamic acid Cas Nr. 5329-14-6 not specific Alkamlimetry Comment
Sulfuric acid Cas Nr. 7664-93-9 95%-97% VLSI Comment
TI spray Cas Nr. no nr. not specific not specific Comment
ZED N50 Cas Nr. no nr. not specific not specific Comment
Triton x-100 Cas Nr. 9002-93-1 not specific not specific Comment
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