[[image:Til LA forside 2024-05-03 161145.png|right|500x500px|thumb|link=|Photos: DTU Nanolab]]
<!--LabAdviser is a process handbook for equipment and processes at the cleanroom facilities and the characterisation facilities in building 314/307. The function and capacity of each piece of equipment is described and general process steps, eg photolithography procedures, are clarified. LabAdviser is meant to advise you to a good starting point for your cleanroom process for further optimization to meet your needs. To enter LabAdviser you need to '''log in with your DTU login'''. LabAdviser is only editable for DTU Nanolab employees. If you need further information about certain machinery or processes, please contact Nanolab personnel. Any feedback you might have on LabAdviser is welcome and can be given by mail to the LabAdviser mailbox: [mailto:labadviser@nanolab.dtu.dk labadviser@nanolab.dtu.dk]-->
LabAdviser is a Wiki owned by DTU Nanolab for users of our facilities. It was created with the main purpose of sharing knowledge. It contains information about available equipment and fabrication processes in the cleanroom facilities in building 346/347 and the electron microscopes and supporting tools in 307/314.
LabAdviser is a wiki accessible for users of the DTU Nanolab facilities. If you are not a current user, [https://www.nanolab.dtu.dk/english '''please take a look at our homepage''']. You can also take a [https://my.matterport.com/show/?m=n7rBdnKvgxd '''virtual tour of the DTU Nanolab cleanroom facility'''] or explore our [https://www.youtube.com/channel/UCJhdUTUJRDNODNiC3V95RQQ '''YouTube channel'''] with a selection of training videos. <br>
LabAdviser contains information about
LabAdviser is designed to help you identify the right equipment and provide a solid starting point for your cleanroom processes or for further optimization to meet specific requirements. However, due to ongoing development of tools and processes, some information may be incomplete or not up-to-date. We make every effort to provide reliable information but we provide no warranty as to the accuracy, reliability or completeness of the information found in LabAdviser.
*equipment at DTU Nanolab that covers micro and nano fabrication in the cleanroom facility in building 346 and surroundings (in building 346 and 347) and characterization equipment, primarily electron microscopy, at building 314 and 307.
*fabrication steps in micro and nano fabrication that takes place at the cleanroom fabrication facility and surroundings and
*electron microscopy methods that takes place at building 314/307.
An overview of the equipment in these facilities can be found and some fabrication process flows and singles fabrication steps are described. In general LabAdviser is meant to advise you to the right equipment and to advise you to a good starting point for your micro and nano fabrication steps as for your electron microscopy work. This should not be replacing communication with the staff of the facilities but we recommend it as a good starting point before contacting the staff. To enter LabAdviser you need to '''log in with your DTU login'''. LabAdviser is only editable for the staff of the facilities. If you need further information about certain machinery or processes, please contact the relevant staff. Any feedback or input you might have to LabAdviser is welcome and can be given by mail to the LabAdviser mailbox: [mailto:labadviser@nanolab.dtu.dk labadviser@nanolab.dtu.dk]
<br>
Please note that LabAdviser is not a replacement for direct communication with DTU Nanolab staff. We strongly recommend reviewing the information on LabAdviser as preparation before reaching out to staff members.
'''News in LabAdviser:''' <br/>
If in doubt, you are always welcome to contact us via [mailto:nanolabsupport@nanolab.dtu.dk nanolabsupport@nanolab.dtu.dk].
*The latest LabAdviser update: [[Media:Monthly_LabAdviser_update_20220119.docx|LabAdviser update send out 2022-01-19]] <br>
<!-- Slides from the customer meeting December 2016: [[media:Stormode 2016.pdf|2016 Customer meeting]] -->
*Slides from the latest Tech Forum from October 25, 2022 are here: https://sites.dtu.dk/ffunanolab
<br/>
== Contents ==
[[Image:Virtual tour in the clean room.JPG|right|300px|thumb|link=https://www.nanolab.dtu.dk/capabilities/cleanroom-3d-tour|Click to Enter the Virtual Tour through DTU Nanolabs cleanroom]]
[[Image:YouTube.JPG|right|200px|thumb|DTU Nanolab on YouTube [[https://www.youtube.com/channel/UCJhdUTUJRDNODNiC3V95RQQ]]]]
[[Image:Virtual tour in the clean room.JPG|right|200px|thumb|Take a virtual tour in the DTU Nanolab cleanroom [[https://my.matterport.com/show/?m=n7rBdnKvgxd ]]]]
*'''[[/Introduction to LabAdviser and Processing|Introduction to LabAdviser and Micro/Nano Fabrication]]'''
*'''[[/Introduction to LabManager|Introduction to LabManager]]'''
<BR>Even if you are not a current user at our facilities, you are welcome to surf around. Please note that not all information is available without login. You can take a [https://www.nanolab.dtu.dk/capabilities/cleanroom-3d-tour Virtual Tour of the DTU Nanolab cleanroom facility]. Please also take a look at our homepage [https://www.nanolab.dtu.dk/english www.nanolab.dtu.dk] for more information on how to get access and/or collaborate with us as well as our capabilities and research.
<!-- *'''[[/CEN|Characterization in building 314/307 - OLD]] -->
[[Image:YouTube.JPG|right|300px|thumb|link=https://www.youtube.com/@dtunanolab1398|Click to Visit DTU Nanolab on YouTube ]]
*'''[[/314|Characterization in building 314/307]]
*'''[[Specific Process Knowledge|Micro and Nano Fabrication Overview ]]'''
You are also welcome to explore our [https://www.youtube.com/channel/UCJhdUTUJRDNODNiC3V95RQQ YouTube channel] with a selection of training videos.
<BR><BR><br>
'''LabAdviser contains information about'''
*Equipment available in- and outside of the Cleanroom Facility (building 346)
*Equipment for Characterization, primarily Electron Microscopy (building 314 and 307)
*Equipment available in the PolyFabLab and SupportLab (building 347)
*Processes for Micro- and Nanofabrication available at DTU Nanolab
*Methods in Electron Microscopy available in building 314/307
<br>
<br>
==How Labadviser works==
*'''[[Surveys and statistics|Surveys, statistics, monthly LabAdviser updates and other info.]]'''
Among others information, Labadviser offers users nano- and microfabrication information on how to build up a process flow, f.ex.
*'''[[How to add information to LabAdviser]]'''
how to create a pattern, what materials to use, what process or equipment to use, how to avoid cross contamination between machines, or how to clean samples.
The structure of LabAdviser allows users to begin their search either from a known process. For example, if your process involves depositing a gold layer, you would start with the "Thin Film Deposition" section. There, you will find two tables:
<br clear="all" />
* Overview of '''Materials''', ''such semiconductors, oxides, nitrides, metals, etc.''
* Overview over '''Thin Film Deposition Equipment''', ''such as thermal evaporator, e-beam evaporator, sputter coater, etc.''
==Overview of micro and nano fabrication steps - a guide to where you can find fabrication information in LabAdviser==
If you know the material you want to deposit but are unsure which tool to use or how different deposition methods compare, you can select the material (e.g. ''gold''). You will then be directed to a subpage listing all equipment capable of depositing that material and, if available, with some additional material-specific process information.
Alternatively, if you're more interested in a specific piece of equipment, or wish to explore which materials it can process, selecting that equipment will lead you to a dedicated page with detailed process information, including compatible materials.<BR>
!colspan="3" style="text-align:left;" | [[image:Create a film on your sample.png|x100px|Create a layer/film on your sample]] Create a layer/film on your sample
|-
!Entry page in LabAdviser
!Techniques
!Materials
|-
|[[Specific Process Knowledge/Thermal Process/Oxidation| Thermal Process/Oxidation]]
|Thermal oxidation
|Thermal SiO2
|-
|rowspan="8" valign="top"|[[Specific Process Knowledge/Thin film deposition| Thin film deposition]]
!colspan="3" style="text-align:left;" | [[image:Dope your sample.png|x100px|Dope your sample]] Dope your sample
|-
|-
!Entry page in LabAdviser
!Techniques
!Materials
|-
|rowspan="5" valign="top"| [[Specific Process Knowledge/Doping|Doping]]
|Ion implant
|e.g. P, B, As
|-
|[[Specific Process Knowledge/Thin film deposition/PECVD| PECVD]]
|Deposition of SiO2 or Si3N4 doped with P,B and Ge
|-
|[[Specific Process Knowledge/Thin film deposition/Furnace LPCVD PolySilicon|LPCVD ]]
|Deposition of PolySi doped with B or P
|-
|[[Specific Process Knowledge/Thermal Process/Dope with Boron|Predeposition and drive-in]]
|Doping Silicon wafers with boron
|-
|[[Specific Process Knowledge/Thermal Process/Dope with Phosphorus|Predeposition and drive-in]]
|Doping Silicon wafers with phosphorus
|-
Sharing knowledge is the key for further development and all our users are encouraged to contribute. In our laboratories thousands of experiments are made. We want to make sure that the knowledge and experience acquired through these become accessible to current and future users. We are interested in any process development being done on our equipment, and even single tests of new recipes can be helpful. For the safety of our users as well as our equipment, we cannot allow LabAdviser to have an open-for-all-input structure like Wikipedia.
!colspan="3" style="text-align:left;" | [[image:Thermal treat your sample.png|x100px|Thermal treatment of your sample]] Thermal treatment of your sample
|-
!Entry page in LabAdviser
!Techniques
!Materials
|-
|rowspan="5" valign="top"|[[Specific Process Knowledge/Thermal Process|Thermal Process]]
|Annealing (>350C)
|Si, PECVD layers, Al, BCB curing, Polymer
|-
|Oxidation
|Si wafers
|-
|Doping with B/P
|Si wafers
|-
|Pyrolysis
|Resists: AZ, SU8, PDMS
|-
|Rapid Thermal Anneal (RTP)
|SiO2, Si3N4, Ti, III-V
|-
|
[[Specific Process Knowledge/Lithography/Baking| Lithography/Baking]] <br>
!colspan="3" style="text-align:left;" | [[image:Transfer mask pattrn to your sample.png|x100px|Transfer mask pattern to your sample]] Transfer mask pattern to your sample
|-
!Entry page in LabAdviser
!Techniques
!Materials
|-
|rowspan="2" valign="top"|[[Specific Process Knowledge/Etch| Etch]]
!colspan="3" style="text-align:left;" | [[image:Define your structure directly.png|x100px|Define the structure directly on your sample]] Define your structure directly
|-
!Entry page in LabAdviser
!Techniques
!Materials
|-
|rowspan="5" valign="top"|[[Specific Process Knowledge/Direct Structure Definition|Direct Structure Definition]]
!colspan="3" style="text-align:left;" | Process flow examples
|-
!Entry page in LabAdviser
!Topic
|-
|[[LabAdviser/Introduction_to_LabAdviser_and_Processing|Introduction to LabAdviser and Processing]]
|Solar cell flow
|-
|[[Process_flow_approval|Process flow approval]]
|Info on process flow review
|-
|[[Specific Process Knowledge/Lithography/UVLithography#Resist Overview|UV Lithography#Resist Overview]]
|UV Lithography flows
|-
|[[Specific Process Knowledge/Lithography/EBeamLithography#E-beam resists and Process Flows|EBeamLithography#E-beam resists and Process Flows]]
|E-beam lithography flows
|-
|}
|-
We are committed to giving proper credit to all contributors. If you provide material for publication in Labadviser, you will be clearly acknowledged as the author or source. Before publishing your material, we will request your written permission to do so. This ensures transparency and respect for your rights as a creator. More information regarding copyrights can be found [[LabAdviser:Copyright | <b>here</b>]].
|}
----
Any feedback or input is welcome and can be send to the LabAdviser mailbox: [mailto:labadviser@nanolab.dtu.dk labadviser@nanolab.dtu.dk].
<br>
<br>
== Contact Information for the DTU Nanolab fabrication part ==
{{DanchipInfo}}
<!-- The template called DanchipInfo has the address:
==DTU Nanolab Fabrication Cleanroom Naming and Phone Numbers==
== Surveys and Statistics ==
===Cleanroom building 346 ground floor===
'''Surveys'''
{| style="color: black;" width="100%"
| colspan="2" |
|-
| style="width: 50%"|
DTU Nanolab performs regular customer surveys which are available on LabManager. ''Access to LabManager requires a DTU account and access to DTU Nanolab facilities.''
[[image:Cleanroom_naming_2017.jpg|500px|Thumb|Drawing: DTU CAS Digital]]
'''Tech Forum slides'''
|}
The purpose of the Nanolab Technology Forum is to discuss the current and future technological possibilities at Nanolab, including user requirements, current equipment status, equipment acquisition, funding, etc.
| style="width: 50%"|
<!--If you wish to receive the meeting invitation, please sign up beneath.
!-->
Tech Forum slides are available on LabManager. ''Access to LabManager requires a DTU account and access to DTU Nanolab facilities.''
LabAdviser is a Wiki owned by DTU Nanolab for users of our facilities. It was created with the main purpose of sharing knowledge. It contains information about available equipment and fabrication processes in the cleanroom facilities in building 346/347 and the electron microscopes and supporting tools in 307/314.
LabAdviser is designed to help you identify the right equipment and provide a solid starting point for your cleanroom processes or for further optimization to meet specific requirements. However, due to ongoing development of tools and processes, some information may be incomplete or not up-to-date. We make every effort to provide reliable information but we provide no warranty as to the accuracy, reliability or completeness of the information found in LabAdviser.
Please note that LabAdviser is not a replacement for direct communication with DTU Nanolab staff. We strongly recommend reviewing the information on LabAdviser as preparation before reaching out to staff members.
Click to Enter the Virtual Tour through DTU Nanolabs cleanroom
Even if you are not a current user at our facilities, you are welcome to surf around. Please note that not all information is available without login. You can take a Virtual Tour of the DTU Nanolab cleanroom facility. Please also take a look at our homepage www.nanolab.dtu.dk for more information on how to get access and/or collaborate with us as well as our capabilities and research.
Click to Visit DTU Nanolab on YouTube
You are also welcome to explore our YouTube channel with a selection of training videos.
LabAdviser contains information about
Equipment available in- and outside of the Cleanroom Facility (building 346)
Equipment for Characterization, primarily Electron Microscopy (building 314 and 307)
Equipment available in the PolyFabLab and SupportLab (building 347)
Processes for Micro- and Nanofabrication available at DTU Nanolab
Methods in Electron Microscopy available in building 314/307
How Labadviser works
Among others information, Labadviser offers users nano- and microfabrication information on how to build up a process flow, f.ex.
how to create a pattern, what materials to use, what process or equipment to use, how to avoid cross contamination between machines, or how to clean samples.
The structure of LabAdviser allows users to begin their search either from a known process. For example, if your process involves depositing a gold layer, you would start with the "Thin Film Deposition" section. There, you will find two tables:
Overview of Materials, such semiconductors, oxides, nitrides, metals, etc.
Overview over Thin Film Deposition Equipment, such as thermal evaporator, e-beam evaporator, sputter coater, etc.
If you know the material you want to deposit but are unsure which tool to use or how different deposition methods compare, you can select the material (e.g. gold). You will then be directed to a subpage listing all equipment capable of depositing that material and, if available, with some additional material-specific process information.
Alternatively, if you're more interested in a specific piece of equipment, or wish to explore which materials it can process, selecting that equipment will lead you to a dedicated page with detailed process information, including compatible materials.
How to add Information to Labadviser
Sharing knowledge is the key for further development and all our users are encouraged to contribute. In our laboratories thousands of experiments are made. We want to make sure that the knowledge and experience acquired through these become accessible to current and future users. We are interested in any process development being done on our equipment, and even single tests of new recipes can be helpful. For the safety of our users as well as our equipment, we cannot allow LabAdviser to have an open-for-all-input structure like Wikipedia.
We are committed to giving proper credit to all contributors. If you provide material for publication in Labadviser, you will be clearly acknowledged as the author or source. Before publishing your material, we will request your written permission to do so. This ensures transparency and respect for your rights as a creator. More information regarding copyrights can be found here.
Any feedback or input is welcome and can be send to the LabAdviser mailbox: labadviser@nanolab.dtu.dk.
Surveys and Statistics
Surveys
DTU Nanolab performs regular customer surveys which are available on LabManager. Access to LabManager requires a DTU account and access to DTU Nanolab facilities.
The purpose of the Nanolab Technology Forum is to discuss the current and future technological possibilities at Nanolab, including user requirements, current equipment status, equipment acquisition, funding, etc.
Tech Forum slides are available on LabManager. Access to LabManager requires a DTU account and access to DTU Nanolab facilities.
