Template:Peg2TableCColors: Difference between revisions
Created page with "{| class="wikitable mw-collapsible autocollapse" border="1" style="text-align:center;border-spacing: 0px;" |+'''{{{TableHeader}}}''' |- ! rowspan="3" | <span title="Recipe name" >Recipe</span> ! style="background:gainsboro; color:black;" colspan="6" rowspan="2" width="100" | <span title="The General tab" >General</span> ! style="background:lime; color:black;" colspan="6" | <span title="The Pressure tab. Either (%) - fixed APC or (mTorr) - fixed pressure" >Pressure</span..." |
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Latest revision as of 07:47, 13 February 2023
| Recipe | General | Pressure | Gases | Generators | Matching | Tem- pera- ture | BGC EM EPD | Results | ||||||||||||||||||||||||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Dp | Et | SF6-1 | SF6-2 | O2 | Ar | N2 | He | Coil | Platen | Coil | Platen | |||||||||||||||||||||||||||||||
| Platen | St | S/E | Dp | Et | R | D | B | M | D | B | M | Dp | Et | Dp | Et | Dp | Et | Dp | Et | Dp | Et | Dp | Et | Dp | Et | Dp | Et | Dp | Et | Dp | Et | Runs | Keywords | |||||||||