Specific Process Knowledge/Etch/Titanium Oxide/ICP metal: Difference between revisions
Tag: Rollback |
|||
| (2 intermediate revisions by 2 users not shown) | |||
| Line 3: | Line 3: | ||
===Etching of TiO2 using ICP metal has been tested Evgeniy Shkondin | ===Etching of TiO2 using ICP metal has been tested Evgeniy Shkondin, DTU Nanolab=== | ||
Recipe used: Ti etch <br> | Recipe used: Ti etch <br> | ||
[[image:TiO2_etch_Evgeniy2.jpg|400px]] | [[image:TiO2_etch_Evgeniy2.jpg|400px]] | ||
Latest revision as of 14:16, 4 September 2025
Feedback to this page: click here
Etching of TiO2 using ICP metal has been tested Evgeniy Shkondin, DTU Nanolab
Recipe used: Ti etch
