Specific Process Knowledge/Etch/DRIE-Pegasus/processD: Difference between revisions
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== Process D == | == Process D == | ||
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In this section the original version of process D is described. Since the [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange|change of the showerhead in December 2014]] an improved version of process D should be considered as well, see next section. | In this section the original version of process D is described. Since the [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange|change of the showerhead in December 2014]] an improved version of process D should be considered as well, see next section. | ||