Specific Process Knowledge/Lithography/ARN8200: Difference between revisions
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Area/curved element dose: Fully insoluble dose is around 150-180 µC/cm2. | |||
Line dose: Fully insoluble dose is around 1700 pC/cm. | |||
Dot dose: Fully insoluble dose is around 0.1 pC, this gives a circular diameter of 60 nm. Diameter can be varied by increasing dose, at 0.4 pC diameter is about 100 nm and at 1.2 pC it is about 170 nm. | |||