Specific Process Knowledge/Etch/Aluminum Oxide/Al2O3 Etch with ICP Metal: Difference between revisions
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|-style="background:Black; color:White" | |-style="background:Black; color:White" | ||
! Parameter | ! Parameter | ||
|Recipe name: ''' | |Recipe name: '''Al2O3 Etch''' | ||
|- | |- | ||
|Coil Power [W] | |Coil Power [W] | ||
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<br clear="all" /> | <br clear="all" /> | ||
==Al2O3 etching by sanvis@nanolab== | ==Al2O3 etching by Sanjeev Vishal Kota sanvis@nanolab== | ||
*[[Media:Alumina etch information.pptx|Presentation made by Sanvis @DTU Nanolab, click to view]] | |||
{| border="1" cellspacing="2" cellpadding="2" | |||
|-style="background:Black; color:White" | |||
! Parameter | |||
|Nanoscale Al2O3 etch | |||
|Microscale Al2O3 etch | |||
|- | |||
|Coil Power [W] | |||
|300 | |||
|500 | |||
|- | |||
|Platen Power [W] | |||
|15 | |||
|70 | |||
|- | |||
|Platen temperature [<sup>o</sup>C] | |||
|0 | |||
|0 | |||
|- | |||
|BCl3 flow [sccm] | |||
|20 | |||
|40 | |||
|- | |||
|Cl<sub>2</sub> flow [sccm] | |||
|7 | |||
|15 | |||
|- | |||
|Pressure [mTorr] | |||
|1.2 | |||
|3.0 | |||
|- | |||
|} | |||
{| border="2" cellspacing="2" cellpadding="3" | |||
|-style="background:DarkGray; color:White" | |||
!Material to be etched | |||
!Nanoscale Al2O3 etch | |||
!Microscale Al2O3 etch | |||
|- | |||
|Etch rate | |||
|'''6.25 nm/min on 6" wafer''', ''Summer sanvis@nanolab'' | |||
|'''25 nm/min on small samples on Si carrier''', ''Summer 2022 sanvis@nanolab'' | |||
|- | |||
|} | |||
<br clear="all" /> | |||
==Al2O3 etching by bghe@nanolab== | ==Al2O3 etching by bghe@nanolab== | ||
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===Results=== | ===Results=== | ||
<gallery caption="Profile view" widths=" | <gallery caption="Profile view, etch time 40 min, started with 380 nm zep resist" widths="400px" heights="325px" perrow="3"> | ||
Image:S038116_01.jpg | Image:S038116_01.jpg | ||
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</gallery> | </gallery> | ||
<gallery caption="Top view after resist strip" widths=" | <gallery caption="Top view after resist strip" widths="400px" heights="325px" perrow="3"> | ||
Image:metalS038116top_03.jpg | Image:metalS038116top_03.jpg | ||
Image:metalS038116top_04.jpg | Image:metalS038116top_04.jpg | ||
Image:metalS038116top_06.jpg | Image:metalS038116top_06.jpg | ||
</gallery> | </gallery> | ||