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'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/Courses click here]'''  
'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/Courses click here]'''  


'''Unless anything else is stated, everything on this page, text and pictures are made by DTU Nanolab.'''


=Courses=
=Courses=
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![[/TPT Lithography|TPT Lithography]]
![https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Lithography#Lithography_Tool_Package_Training Lithography TPT]
|for working with [[Specific_Process_Knowledge/Lithography|lithography]]
|for working with [[Specific_Process_Knowledge/Lithography|lithography]]
|The course includes theory on lithographic processes and equipment, as well as training in equipment operation and processing in the cleanroom. The course is for all users that intend to perform any kind of lithographic processing in the cleanroom, and is a prerequisite for training in other lithography equipment.
|The course includes theory on lithographic processes and equipment, as well as training in equipment operation and processing in the cleanroom. The course is for all users that intend to perform any kind of lithographic processing in the cleanroom, and is a prerequisite for training in other lithography equipment.
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![[/TPT Thin Film|TPT Thin Film]]
![[/TPT Thin Film|TPT Thin Film]]
|for getting access to thin film deposition/growth equipment
|for getting access to thin film deposition/growth equipment
|This is a theoretical course introducing the deposition and growth techniques available at DTU Nanolab. The Users that have to use any thin film growth and/or deposition tools in the cleanroom will have to sign up for the lectures before they apply for a training.  
|This is a theoretical course introducing the thin film growth and deposition techniques available at DTU Nanolab. The course consists of two lectures. Users that have to use any thin film growth and/or deposition tools in the cleanroom will have to sign up for the lectures, before they apply for a training.  
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==The Lithography TPT ==
==The Lithography TPT ==
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==Thin Film TPT ==
==Thin Film TPT ==
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== PhD course (10868 Methods in micro and nano fabrication) ==
== PhD course (10868 Methods in micro and nano fabrication) ==
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DTU Nanolab has a YouTube channel where we have gathered all our training videos: [https://www.youtube.com/channel/UCJhdUTUJRDNODNiC3V95RQQ]
DTU Nanolab has a YouTube channel where we have gathered all our training videos: [https://www.youtube.com/channel/UCJhdUTUJRDNODNiC3V95RQQ]


We have a number of playlists and some single videos for equipment. You can get an overview here with links to the videos on You Tube
We have a number of playlists and some single videos for equipment. You can get an overview here with links to the playlists/videos on You Tube
 
==Safety and behavior==
*Nanolab introduction course: Safety in the Cleanroom [https://www.youtube.com/watch?v=vq5v4xSqH6Q]
*Safety at DTU Nanolab [https://www.youtube.com/watch?v=mKGJfU57vbE]
*Behaviour in the cleanroom at DTU Nanolab [https://www.youtube.com/watch?v=yCVr53mk7rw]
*Playlist: Craftsmen in the cleanroom/håndværkere i renrummet. [https://www.youtube.com/watch?v=D-0T9X9FFBQ&list=PLjWVU97LayHDKnUd0GrKXdqDhRZuI3iwW]
 
==Labmanager and Labadviser==
*Playlist: DTU Nanolab systems (Labmanager and Labadviser)[https://www.youtube.com/watch?v=jC5soGfyrZc&list=PLjWVU97LayHA_ZKxvmNfTg1Bp53GX07ER]


==Safety/Wet chemistry==
==Wet chemistry==
*Nanolab introduction course: Safety in the Cleanroom / Sikkerhed i renrum [https://www.youtube.com/watch?v=vq5v4xSqH6Q&list=PLjWVU97LayHDP2xIUv_Uku7RW6l-vg1M_]
*Training in fume hoods part 1 - Intro and Getting Started [https://www.youtube.com/watch?v=DRPHtBAqpU0]
*Training in fume hoods part 2 - Working With Acids, Bases and Solvents [https://www.youtube.com/watch?v=sqqktgLklSs]
*Training in fume hoods part 3 – Wet benches and errors [https://www.youtube.com/watch?v=bvK1ONO1lwM]
*Using Quick Dump Rinse Baths [https://www.youtube.com/watch?v=edMt18Uwq9o&list=PLjWVU97LayHCS7pcUsx1qt7vroSdHciXV]
*Using Quick Dump Rinse Baths [https://www.youtube.com/watch?v=edMt18Uwq9o&list=PLjWVU97LayHCS7pcUsx1qt7vroSdHciXV]
*Native Silicon Dioxide Removal [https://www.youtube.com/watch?v=4JD-fSWlZac]


==General purpose==
==Lithography==
==Lithography==
* Playlist: Lithography TPT lecture videos [https://www.youtube.com/playlist?list=PLjWVU97LayHCp7x9OujmVlZWLAnK4CDFR]
==Thin Film==
* Playlist: Lithography TPT tool training videos (equipment) [https://www.youtube.com/watch?v=3JhM3rmLVpA&list=PLjWVU97LayHCX4sz2AH_YiPbNRmkrBYe5] (spin coater, mask aligner, developer)
*E-beam evaporator (Temescal) [https://www.youtube.com/watch?v=XNvnv4R8a5o&list=PLjWVU97LayHCQWuQyHwddJnpsEYfQp0wf]
* E-beam lithography at DTU Nanolab [https://www.youtube.com/watch?v=2bFUO201DS4]
* JEOL 9500 EBL Training [https://youtu.be/-wZpUNAq8dA?si=UCWm9rL5SoJE9t1I]
* Playlist: MLA [https://www.youtube.com/watch?v=GyTQNmbev2c&list=PLjWVU97LayHAiCabstMfAUeeWyQoQI_cV]
* Manual spin coater Labspin Training [https://www.youtube.com/watch?v=_neUkDsQhsM]
*Developer: TMAH Manual [https://www.youtube.com/watch?v=btinNzYnLnY&t=2s]
 
==Thin Film deposition and oxidation==
*Playlist: E-beam evaporator (Temescal) [https://www.youtube.com/watch?v=XNvnv4R8a5o&list=PLjWVU97LayHCQWuQyHwddJnpsEYfQp0wf]
*Lesker dual chamber sputter system at DTU Nanolab [https://www.youtube.com/watch?v=1WHv36coRUc]
*Antistiction treatment [https://www.youtube.com/watch?v=5NrPWXVybXg]
* Furnace training: Oxidation furnace [https://www.youtube.com/watch?v=Hi-1zN1RVqc]


==Dry Etch==
==Dry Etch==
*Dry Etch TPT - hands-on videos [https://www.youtube.com/watch?v=ovNM4A4E8Q0&list=PLjWVU97LayHC9cl0cuB65m-FlIScBd5t9]
*Playlist: Dry Etch TPT - hands-on videos [https://www.youtube.com/watch?v=ovNM4A4E8Q0&list=PLjWVU97LayHC9cl0cuB65m-FlIScBd5t9]
*Dry Etch TPT - Lecture videos [https://www.youtube.com/watch?v=6k6QUyDKQQc&list=PLjWVU97LayHBu0XwMGHss5CdEhka6B72U]
*Playlist: Dry Etch TPT - Lecture videos [https://www.youtube.com/watch?v=6k6QUyDKQQc&list=PLjWVU97LayHBu0XwMGHss5CdEhka6B72U]


==Characterization==
==Characterization==
*Playlist: SEM Training videos for Zeiss Supra SEMs in building 346 [https://www.youtube.com/watch?v=JuFZUsbSHvQ&list=PLjWVU97LayHAIltgr7pUoeIkwiPuP4Qsj]
*Playlist: AFM Icon Nanoscope software training part I/II/III [https://www.youtube.com/watch?v=i6JXopjBiy4&list=PLjWVU97LayHC9xeoG2uv8IaHuY7t-q0Tj]
*Ellipsometer training [https://www.youtube.com/watch?v=EC-oyRhKr0A]
*Playlist: XPS [https://www.youtube.com/playlist?list=PLjWVU97LayHBtOkPCSv8QA-sD4Dbz1jrb]
==Backend tools==
* Disco Dicing saw - blade exchange [https://www.youtube.com/watch?v=0pMraXlfqh8]

Latest revision as of 08:06, 25 September 2024

Feedback to this page: click here

Unless anything else is stated, everything on this page, text and pictures are made by DTU Nanolab.

Courses

We are building up a number of courses to educate our users in using the cleanroom facility and the equipment inside along with training for our other facilities. Below you can see the courses that are presently running. The introduction Courses is mandatory for all users that need to use our facilities on their own. Then there is a number of TPT's (Tool Package Training Courses) that you need to attend depending on which kind of tool you need to use inside the facility.

Course Mandatory... Short Course Decription
Cleanroom introduction course for working inside the cleanroom See the homepage
Other Nanolabs facilities introduction course for working in other Nanolab facilities See the homepage
Lithography TPT for working with lithography The course includes theory on lithographic processes and equipment, as well as training in equipment operation and processing in the cleanroom. The course is for all users that intend to perform any kind of lithographic processing in the cleanroom, and is a prerequisite for training in other lithography equipment.
Mask Design no The course is recommended all users who intend to design their own masks for lithography.
TPT SEM for getting access to SEMs at DTU Nanolab The course includes theory about SEM, as well as training in instrument operation. The course is for all users who intend to perform any kind of SEM related process and is a prerequisite for training in any of the SEM in building 314 and 346 at DTU Nanolab and for SEM in building 375.
TPT Dry Etch for getting access to dry etch equipment The course includes theory on dry etching and equipment, as well as training in equipment operation in the cleanroom. The course is for all users who intend to perform any kind of dry etching in the cleanroom, and is a prerequisite for training in any of the dry etch equipment.
TPT Thin Film for getting access to thin film deposition/growth equipment This is a theoretical course introducing the thin film growth and deposition techniques available at DTU Nanolab. The course consists of two lectures. Users that have to use any thin film growth and/or deposition tools in the cleanroom will have to sign up for the lectures, before they apply for a training.
Ph.d. course: 10868 Methods in micro and nano fabrication for ph.d. students at Nanolab This is a course aimed at PhD students new to work in the DTU Nanolab cleanroom. The objective is to accelerate research projects by providing a fast track learning towards hands-on cleanroom fabrication. To attend the course you MUST have a PhD project (or similar) that require you to work in the DTU Nanolab cleanroom. The course gives you a chance to present and discuss your project with some of your fellow PhD students and experienced process specialists from DTU Nanolab. The TPT courses are a main part of the course. The course gives you 5 ECTS points.



Links to training videos

DTU Nanolab has a YouTube channel where we have gathered all our training videos: [1]

We have a number of playlists and some single videos for equipment. You can get an overview here with links to the playlists/videos on You Tube

Safety and behavior

  • Nanolab introduction course: Safety in the Cleanroom [2]
  • Safety at DTU Nanolab [3]
  • Behaviour in the cleanroom at DTU Nanolab [4]
  • Playlist: Craftsmen in the cleanroom/håndværkere i renrummet. [5]

Labmanager and Labadviser

  • Playlist: DTU Nanolab systems (Labmanager and Labadviser)[6]

Wet chemistry

  • Training in fume hoods part 1 - Intro and Getting Started [7]
  • Training in fume hoods part 2 - Working With Acids, Bases and Solvents [8]
  • Training in fume hoods part 3 – Wet benches and errors [9]
  • Using Quick Dump Rinse Baths [10]
  • Native Silicon Dioxide Removal [11]

Lithography

  • Playlist: Lithography TPT lecture videos [12]
  • Playlist: Lithography TPT tool training videos (equipment) [13] (spin coater, mask aligner, developer)
  • E-beam lithography at DTU Nanolab [14]
  • JEOL 9500 EBL Training [15]
  • Playlist: MLA [16]
  • Manual spin coater Labspin Training [17]
  • Developer: TMAH Manual [18]

Thin Film deposition and oxidation

  • Playlist: E-beam evaporator (Temescal) [19]
  • Lesker dual chamber sputter system at DTU Nanolab [20]
  • Antistiction treatment [21]
  • Furnace training: Oxidation furnace [22]

Dry Etch

  • Playlist: Dry Etch TPT - hands-on videos [23]
  • Playlist: Dry Etch TPT - Lecture videos [24]

Characterization

  • Playlist: SEM Training videos for Zeiss Supra SEMs in building 346 [25]
  • Playlist: AFM Icon Nanoscope software training part I/II/III [26]
  • Ellipsometer training [27]
  • Playlist: XPS [28]

Backend tools

  • Disco Dicing saw - blade exchange [29]