Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-3/DREM: Difference between revisions
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[[Specific Process Knowledge/Etch/DRIE/Pegasus-3/DREM/DREM 0. | |||
= DREM 0.2kW = | |||
{{Template:Peg1RecipeTableVerCColors | |||
|TableHeader=DREM 0.2 kW v2 | |||
}} | |||
{{Template:Peg1RecipeTableVerCAddrowColors | |||
|RecipeName=DREM 0.2kW | |||
|PriorProcessSteps= Clamp Substrate,Pump to base, home platen matching unit, barc1, stab | |||
|Keywords= | |||
|PlatenPosition=U |PlatenFrequency=HF |StabilisationTime= |StartCycleEndCycle=D/E | |||
|DepositionTime=2.8 |EtchTime=2.6 |NumberOfCycles= | |||
|PressureDepDelay= |PressureDepBoost= |PressureDepMain=100% | |||
|PressureEtchDelay= |PressureEtchBoost= |PressureEtchMain=100% | |||
|C4F8DepDelay=0.3@5 |C4F8DepBoost= 0.5@15 |C4F8DepMain=25 | |||
|C4F8EtchDelay=0.3@25 |C4F8EtchBoost= |C4F8EtchMain=5 | |||
|SF6DepDelay=0.3@15 |SF6DepBoost=0.5@10 |SF6DepMain=10 | |||
|SF6EtchDelay=1.9@10 |SF6EtchBoost=0.5@20 |SF6EtchMain=20 | |||
|O2Dep= |O2Etch= |ArDep=60 |ArEtch=60 | |||
|WCoilDep=0.25 |WCoilEtch=0.25 |WPlatenDep=1 | |||
|WPlatenEtchDelay=0.9@1 |WPlatenEtchBoost=1@20 |WPlatenEtchMain=1 | |||
|%CoilDepLoad=40 |%CoilDepTune=50 |%CoilEtchLoad=40 |%CoilEtchTune=50 | |||
|%PlatenDepLoad=38.2 |%PlatenDepTune=53.8 |%PlatenEtchLoad=38.2 |%PlatenEtchTune=53.8 | |||
|Temperature=0 | |||
|Link2RecipeRun=[[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-3/DREM0.2kW | '''1''']] | |||
|Link2RecipeRun=[[Main Page/Process Logs/jmli/Pegasus3/DREM/DREM 0.2kW newMFC | '''9''']] | |||
}} | |||
|} | |||
Latest revision as of 09:46, 24 January 2022
The DREM 0.5kW v2.3 recipe is in the standard recipe folder.
| Recipe | General | Pressure | Gases | Generators | Matching | Tem- pera- ture | Results | |||||||||||||||||||||||||||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| C4F8 | SF6 | Ar | Coil | Platen | Coil | Platen | ||||||||||||||||||||||||||||||||||||||
| Platen | Stb | S/E | Dp | Et | Cyc | Dp | Et | Dp | Et | Dp | Et | Dp | Et | Dp | Et | Dp | Et | Dp | Et | Dp | Et | Runs | Keywords | |||||||||||||||||||||
| U/D | H/L | D | B | M | D | B | M | D | B | M | D | B | M | D | B | M | D | B | M | D | B | M | L | T | L | T | L | T | L | T | ||||||||||||||
| DREM 0.5kW v2.3 | Clamp Substrate,Pump to base, home platen matching unit, barc1, stab | 10+ | ||||||||||||||||||||||||||||||||||||||||||
| U | HF | D/E | 3 | 2.5 | 100% | 100% | 0.3@5 | 0.5@10 | 45 | 0.3@25 | 5 | 0.3@20 | 0.5@10 | 10 | 1.9@20 | 0.5@30 | 30 | 75 | 1.5@75,75 | 0.5 | 0.5 | 1 | 0.9@1 | 1@40 | 1 | 45 | 50 | 45 | 50 | 41 | 60 | 41 | 60 | 0 | ||||||||||
DREM 0.2kW
| Recipe | General | Pressure | Gases | Generators | Matching | Tem- pera- ture | Results | |||||||||||||||||||||||||||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| C4F8 | SF6 | Ar | Coil | Platen | Coil | Platen | ||||||||||||||||||||||||||||||||||||||
| Platen | Stb | S/E | Dp | Et | Cyc | Dp | Et | Dp | Et | Dp | Et | Dp | Et | Dp | Et | Dp | Et | Dp | Et | Dp | Et | Runs | Keywords | |||||||||||||||||||||
| U/D | H/L | D | B | M | D | B | M | D | B | M | D | B | M | D | B | M | D | B | M | D | B | M | L | T | L | T | L | T | L | T | ||||||||||||||
| DREM 0.2kW | Clamp Substrate,Pump to base, home platen matching unit, barc1, stab | 9 | ||||||||||||||||||||||||||||||||||||||||||
| U | HF | D/E | 2.8 | 2.6 | 100% | 100% | 0.3@5 | 0.5@15 | 25 | 0.3@25 | 5 | 0.3@15 | 0.5@10 | 10 | 1.9@10 | 0.5@20 | 20 | 60 | 60 | 0.25 | 0.25 | 1 | 0.9@1 | 1@20 | 1 | 40 | 50 | 40 | 50 | 38.2 | 53.8 | 38.2 | 53.8 | 0 | ||||||||||