Latest revision as of 13:15, 30 October 2023

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Unless otherwise stated, the content of this page was created by the dry etch group at DTU Nanolab

XPS Data processing with Avantage

How to analyze data

In this section, all steps (import data, add peaks and backgrounds etc.) of the analysis are described.

XPS Simplified

The web page XPS Simplified is a ThermoScientific page where you can find a lot of information about the techniques, the hardware, data analysis etc.

XPS Knowledge View

A knowledge database providing specific information on every element is included in the software. It provides very useful information about the XPS characteristics of every detectable element and it may even be a very good idea to consult it before the data is acquired. Click HERE to get information on how to access XPS Knowledge View in Avantage.

Basic instructions

Click HERE to have a complete walk-through of an example. This includes

Open data file
Open and analyze survey spectrum
Analyze high resolution spectra of the individual spectra:
- Add background
- Add peaks
- Quantify
Analyze depth profiles

Guidelines on data processing

Click HERE to see some general guidelines on data processing in Avantage.

Introduction to data analysis with Avantage by Thermofisher

In the Youtube video below, the application specialist from Thermorfisher Paul Mack walks you through Avantage...somewhat slowly..

Click here

Examples of data analysis

Depth profile of ALD layers: Silicon wafer with 15 nm Al₂O₃, 15 nm of TiO₂ and 16 nm of HfO₂

Depth profile of a silicon wafer with nitride, polysilicon and oxide layer

Periodic table with binding energies of all elements

Specific Process Knowledge/Characterization/XPS/Processing/PeriodicTable

XPS data analysis with CasaXPS

CasaXPS has its own Youtube channel with more than 250 videos so it would be a complete waste of time to make any instructions here. Instead, this is where you as a CasaXPS user could contribute to this database: In case you found any Youtube video that was particularly good, please notify us and we will post a link.

In order to use CasaXPS, you will need to export the data from Avantage and convert it into the Vamas format. Click this link to find more information.

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 '''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php?title=Specific_Process_Knowledge/Characterization/XPS/Processing click here]'''
-= Installation of XPS software =
+<!-- Page reviewed 8/5-2023 jmli -->
+<!--Checked for updates on 9/5-2023 - ok/jmli -->
+{{Contentbydryetch}}
-You will need some kind of dedicated software to analyze and interpret the XPS spectra. The internet has many such software packages among which are:
+= XPS Data processing with Avantage =
-* '''Avantage:''' A software platform developed by Thermofisher for acquisition and processing of XPS spectra on their tools. Since both [[Specific Process Knowledge/Characterization/XPS/K-Alpha|the XPS K-Alpha]] and [[Specific Process Knowledge/Characterization/XPS/Nexsa|the XPS Nexsa]] have been manufactured by Thermofisher, Avantage is the native software used on these instruments and no data export or conversion will be necessary. DTU has an academic license that covers all DTU projects for which Avantage can be freely downloaded and licensed, see below. For other academia and commercial users another solution has been established, see also below.
-* '''CasaXPS:''' A commercial XPS data analysis platform that is much more sophiscated compared to Avantage. DTU has an academic license: CasaXPS can be downloaded at http://www.casaxps.com/ or by using the links below.
-Due to the licensing of the software packages, your access to them will depend on whether you are a DTU employee/student (with a valid *@dtu.dk email address) or an external user/other academia.
+== How to analyze data==
-== Users from DTU ==
-=== Avantage ===
-'''Download and install:'''
-To install the last version of Avantage (Thermofisher seems to have stopped at version 5.9925; we did not yet transition to version 6.x), please click the top link below. This will open a shared folder on [https://files.dtu.dk files.dtu.dk] which is an internal DTU file service that works like Dropbox; log on using your DTU initials and password.
-* [https://files.dtu.dk/a/C2Qk3k7kJNwZZCTa/c424f19b-58a5-4a80-b863-6813be405ff2?l https://files.dtu.dk/a/C2Qk3k7kJNwZZCTa/c424f19b-58a5-4a80-b863-6813be405ff2?l]
-* The internet download link [http://www.surfsciftp.co.uk/avant5/download.php http://www.surfsciftp.co.uk/avant5/download.php] has been offline in some periods.
-'''License:'''
-Unzip the file and run the install file. At some point a nine digit computer number (for your installation) will be given and you will be prompted for a processing licence. To get a license, write an email to Thermo [mailto:msd.support.nordic@thermofisher.com msd.support.nordic@thermofisher.com] requesting a standard processing license. You will also have to inform for which system the license has to be used:
-* XPS K-Alpha: System ID KA1002, [mailto:msd.support.nordic@thermofisher.com?Subject=Processing%20license%20for%20user%20of%20K-Alpha%20System%20ID%20KA1002 click here].
-* XPS Nexsa: Serial number NXA9953214, [mailto:msd.support.nordic@thermofisher.com?Subject=Processing%20license%20for%20user%20of%20Nexsa%20System%20with%20Serial%20number%20NXA9953214 click here]
-Usually you will have an answer within a day or two. Use the license to activate Avantage and you are ready to analyze your data.
-=== CasaXPS ===
-Download CasaXPS version 2.3.22PR1.0 from [https://files.dtu.dk files.dtu.dk] (see explanation on files.dtu.dk above) on
-* [https://files.dtu.dk/a/EbnbGFQ52xsDudsc/16dbd9e1-3e3a-4b7f-90b2-2cc5eb3bd33f?l https://files.dtu.dk/a/EbnbGFQ52xsDudsc/16dbd9e1-3e3a-4b7f-90b2-2cc5eb3bd33f?l].
-Unzip the file and you will generate a folder called ''Casa2325rev1-0P'' that contains the executable file ''CasaXPS.exe''. The file is '''not''' an install file but the CasaXPS application itself. Therefore
-# Make sure to copy the ''Casa2325rev1-0P'' folder to an appropriate location from which the application can be launched safely.
-# Always make sure to run the ''CasaXPS.exe'' from this location. Do not make copies of the executable file, instead make desktop shortcuts to the executable.
-== For non-DTU academia and commercial users ==
-Getting a non-DTU license for Avantage is unreasonably expensive so we have made another solution that will provide CasaXPS as well: A virtual PC with Avantage and CasaXPS installed that users on a specific list can log on to for the purpose of analysing XPS data. What to do:
-# Write to Jonas (jmli@dtu.dk or click [mailto:jmli@dtu.dk?Subject=Request%20for%20access%20to%20nlab-xps-avanta here]) requesting to be added to the list.
-# You need a VPN connection to DTU. To get that log on to https://vpn.ait.dtu.dk/ and download/install the Cisco AnyConnect Secure Mobility Client (if not already done).
-# Log on with win\''xxxx'' where ''xxxx'' is your DTU initials.
-# Using the Windows Remote Desktop Connection, log on to nlab-xps-avanta with the same login.
-= XPS Data processing =
-== Avantage: How to analyze data==
 In this section, all steps (import data, add peaks and backgrounds etc.) of the analysis are described.
@@ Line 69: / Line 32: @@
 === Guidelines on data processing ===
 Click [[Specific Process Knowledge/Characterization/XPS/Processing/Guidelines|'''HERE''']] to see some general guidelines on data processing in Avantage.
+== Introduction to data analysis with Avantage by Thermofisher ==
+In the Youtube video below, the application specialist from Thermorfisher Paul Mack walks you through Avantage...somewhat slowly..
+[https://www.youtube.com/watch?v=gVzYThRKjYQ '''Click here ''']
 == Examples of data analysis ==
@@ Line 79: / Line 48: @@
 *[[Specific Process Knowledge/Characterization/XPS/Processing/PeriodicTable]]
+= XPS data analysis with CasaXPS =
+CasaXPS has its own [https://www.youtube.com/channel/UCUqLBeW-UAjXC55HbRYOabQ Youtube channel] with more than 250 videos so it would be a complete waste of time to make any instructions here. Instead, this is where you as a CasaXPS user could contribute to this database: In case you found any Youtube video that was particularly good, please notify us and we will post a link.
+In order to use CasaXPS, you will need to export the data from Avantage and convert it into the Vamas format. Click [[Specific Process Knowledge/Characterization/XPS/Export2CasaXPS | ''this link'']] to find more information.