Specific Process Knowledge/Characterization/Element analysis: Difference between revisions
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The following techniques for elemental analysis are available at Nanolab. | The following techniques for elemental analysis are available at Nanolab. | ||
* EDX | * EDX | ||
* SIMS (no longer available at Nanolab, SIMS service can be provided by | * SIMS (no longer available at DTU Nanolab, SIMS service can be provided by [http://www.eag.com/ EAG Laboratories]) | ||
* XPS (ESCA) | * XPS (ESCA) | ||
In the table below the three techniques are compared | In the table below the three techniques are compared | ||
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== Comparison of EDX, SIMS and XPS == | == Comparison of EDX, SIMS and XPS == | ||
{| border="2" cellspacing="0" cellpadding="2" align=" | {| border="2" cellspacing="0" cellpadding="2" align="left" | ||
!width="100" style="background:silver; color:black" | | !width="100" style="background:silver; color:black" | | ||
!width="250" style="background:silver; color:black" | SEM with [[Specific Process Knowledge/Characterization/EDX|EDX]] | !width="250" style="background:silver; color:black" | SEM with [[Specific Process Knowledge/Characterization/EDX|EDX]] | ||