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Line 1: Line 1:
<!--Checked for updates on 11/11-2024 - ok/jmli -->
{{contentbydryetch}}
=DREM 2kW runs on complete set of Travka 5 to 80 % wafers=
=DREM 2kW runs on complete set of Travka 5 to 80 % wafers=


{| border="2" cellpadding="0" cellspacing="0" style="text-align:center;"
{{Template:ProcessRunPeg1Head
|-
 
! rowspan="2" width="40"| Date
|TableHeader=DREM response to variations is trench widths and etch loads
! colspan="2" width="120"| Substrate Information
|TableStyle = class="wikitable"  
! colspan="4" | Process Information
|PaddingStyle=padding:0px;
! colspan="2" | Results
|PaddingStyle=padding:0px;
|-
|title=Sploof
! width="30" | Wafer info
}} 
! width="40" | Material/ Exposed area
{{Template:ProcessRunPeg1Row
! width="40" | Condi- tioning
|RunDate =27/4-2020
! width="40" | Recipe
|WaferInfo =Travka05 wafer
! width="40" | Wafer ID
|MaterialExposed=Si /  5%
! width="40" | Comments
|Tool=Peg 1
! width="400" |[[Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope|Picoscope]]
|Conditioning=S022327 DREM 2kW RF MU runs
! width="400" |Numbers
|Recipe=nanolab/ jmli / DREM / DREM 2kW, 150 cycles or 11:00 minutes
|-
|WaferID=S022328
! style="background:gainsboro; color:black;" rowspan="2"|27/4-2020
|Comments=Resist etch rate: 62 nm/min [http://labmanager.dtu.dk/function.php?module=Processlog&view=editlog&usageid=384373 Process log entry]
|Travka05 wafer,
|SEMimages=[[file:S022328a049.png |120px|frameless ]][[file:S022328a050.png |120px|frameless ]][[file:S022328a051.png |120px|frameless ]][[file:S022328a052.png |120px|frameless ]][[file:S022328a053.png |120px|frameless ]][[file:S022328a054.png |120px|frameless ]][[file:S022328a055.png |120px|frameless ]][[file:S022328a056.png |120px|frameless ]][[file:S022328a057.png |120px|frameless ]][[file:S022328a058.png |120px|frameless ]][[file:S022328a059.png |120px|frameless ]][[file:S022328a060.png |120px|frameless ]]
|Si /  5%
|PicoscopeImages= [[file:S022328.gif |120px|frameless ]][[file:S022328 01.gif |120px|frameless ]][[file:S022328 02.gif |120px|frameless ]][[file:S022328 03.gif |120px|frameless ]][[file:S022328 04.gif |120px|frameless ]][[file:S022328 05.gif |120px|frameless ]][[file:S022328 06.gif |120px|frameless ]][[file:S022328 07.gif |120px|frameless ]][[file:S022328 08.gif |120px|frameless ]][[file:S022328 09.gif |120px|frameless ]][[file:S022328 10.gif |120px|frameless ]][[file:S022328 11.gif |120px|frameless ]][[file:S022328 12.gif |120px|frameless ]][[file:S022328 13.gif |120px|frameless ]][[file:S022328 14.gif |120px|frameless ]][[file:S022328 15.gif |120px|frameless ]]
|S022327 DREM 2kW RF MU runs
}}
|nanolab/ jmli / DREM / DREM 2kW, 150 cycles or 11:00 minutes
|S022328
|Resist etch rate: 62 nm/min [http://labmanager.dtu.dk/function.php?module=Processlog&view=editlog&usageid=384373 Process log entry]
| [[file:S022328.gif |120px|frameless ]]
[[file:S022328 01.gif |120px|frameless ]]
[[file:S022328 02.gif |120px|frameless ]]
[[file:S022328 03.gif |120px|frameless ]]
[[file:S022328 04.gif |120px|frameless ]]
[[file:S022328 05.gif |120px|frameless ]]
[[file:S022328 06.gif |120px|frameless ]]
[[file:S022328 07.gif |120px|frameless ]]
[[file:S022328 08.gif |120px|frameless ]]
[[file:S022328 09.gif |120px|frameless ]]
[[file:S022328 10.gif |120px|frameless ]]
[[file:S022328 11.gif |120px|frameless ]]
[[file:S022328 12.gif |120px|frameless ]]
[[file:S022328 13.gif |120px|frameless ]]
[[file:S022328 14.gif |120px|frameless ]]
[[file:S022328 15.gif |120px|frameless ]]
<!-- Add picoscope links here:[[file:S022328 |120px|frameless ]] -->
<!-- [[/S022328 | Single gifs ]] -->
|
{| {{table}}  
{| {{table}}  
| align="center" style="background:#f0f0f0;"|'''SEM image:'''
| align="center" style="background:#f0f0f0;"|'''SEM image:'''
Line 75: Line 58:
|-  
|-  
|}
|}
|-
| style="background:gainsboro; color:black;" colspan="8"|
[[file:S022328a049.png |120px|frameless ]]
[[file:S022328a050.png |120px|frameless ]]
[[file:S022328a051.png |120px|frameless ]]
[[file:S022328a052.png |120px|frameless ]]
[[file:S022328a053.png |120px|frameless ]]
[[file:S022328a054.png |120px|frameless ]]
[[file:S022328a055.png |120px|frameless ]]
[[file:S022328a056.png |120px|frameless ]]
[[file:S022328a057.png |120px|frameless ]]
[[file:S022328a058.png |120px|frameless ]]
[[file:S022328a059.png |120px|frameless ]]
[[file:S022328a060.png |120px|frameless ]]
|-
| colspan="9"| .
|-
|-
! style="background:gainsboro; color:black;" rowspan="2"|27/4-2020
{{Template:ProcessRunPeg1Row
|Travka10 wafer,
|RunDate =27/4-2020
|Si /  10%
|WaferInfo =Travka10 wafer,
|S022328 +1min TDESC clean
|MaterialExposed=Si /  10%
|nanolab/ jmli / DREM / DREM 2kW, 150 cycles or 11:00 minutes
|Tool=Peg 1
|S022329
|Conditioning=S022328 +1min TDESC clean
|Resist etch rate: 60 nm/min [http://labmanager.dtu.dk/function.php?module=Processlog&view=editlog&usageid=384373 Process log entry]
|Recipe=nanolab/ jmli / DREM / DREM 2kW, 150 cycles or 11:00 minutes
| [[file:S022329.gif |120px|frameless ]]
|WaferID=S022329
[[file:S022329 01.gif |120px|frameless ]]
|Comments=Resist etch rate: 60 nm/min [http://labmanager.dtu.dk/function.php?module=Processlog&view=editlog&usageid=384373 Process log entry]
[[file:S022329 02.gif |120px|frameless ]]
|SEMimages=[[file:S022329a061.png |120px|frameless ]][[file:S022329a062.png |120px|frameless ]][[file:S022329a063.png |120px|frameless ]][[file:S022329a064.png |120px|frameless ]][[file:S022329a065.png |120px|frameless ]][[file:S022329a066.png |120px|frameless ]][[file:S022329a067.png |120px|frameless ]][[file:S022329a068.png |120px|frameless ]][[file:S022329a069.png |120px|frameless ]][[file:S022329a070.png |120px|frameless ]][[file:S022329a071.png |120px|frameless ]][[file:S022329a072.png |120px|frameless ]]
[[file:S022329 03.gif |120px|frameless ]]
|PicoscopeImages=[[file:S022329.gif |120px|frameless ]][[file:S022329 01.gif |120px|frameless ]][[file:S022329 02.gif |120px|frameless ]][[file:S022329 03.gif |120px|frameless ]][[file:S022329 04.gif |120px|frameless ]][[file:S022329 05.gif |120px|frameless ]][[file:S022329 07.gif |120px|frameless ]][[file:S022329 08.gif |120px|frameless ]][[file:S022329 09.gif |120px|frameless ]][[file:S022329 10.gif |120px|frameless ]][[file:S022329 11.gif |120px|frameless ]][[file:S022329 12.gif |120px|frameless ]][[file:S022329 13.gif |120px|frameless ]][[file:S022329 14.gif |120px|frameless ]]
[[file:S022329 04.gif |120px|frameless ]]
}}
[[file:S022329 05.gif |120px|frameless ]]
[[file:S022329 07.gif |120px|frameless ]]
[[file:S022329 08.gif |120px|frameless ]]
[[file:S022329 09.gif |120px|frameless ]]
[[file:S022329 10.gif |120px|frameless ]]
[[file:S022329 11.gif |120px|frameless ]]
[[file:S022329 12.gif |120px|frameless ]]
[[file:S022329 13.gif |120px|frameless ]]
[[file:S022329 14.gif |120px|frameless ]]
<!-- Add picoscope links here:[[file:S022329 |120px|frameless ]] -->
<!-- [[/S022329 | Single gifs ]] -->
|
{| {{table}}  
{| {{table}}  
| align="center" style="background:#f0f0f0;"|'''SEM image:'''
| align="center" style="background:#f0f0f0;"|'''SEM image:'''
Line 148: Line 103:
|-  
|-  
|}
|}
|-
| style="background:gainsboro; color:black;" colspan="8"|
[[file:S022329a061.png |120px|frameless ]]
[[file:S022329a062.png |120px|frameless ]]
[[file:S022329a063.png |120px|frameless ]]
[[file:S022329a064.png |120px|frameless ]]
[[file:S022329a065.png |120px|frameless ]]
[[file:S022329a066.png |120px|frameless ]]
[[file:S022329a067.png |120px|frameless ]]
[[file:S022329a068.png |120px|frameless ]]
[[file:S022329a069.png |120px|frameless ]]
[[file:S022329a070.png |120px|frameless ]]
[[file:S022329a071.png |120px|frameless ]]
[[file:S022329a072.png |120px|frameless ]]
|-
| colspan="9"| .
|-
|-
! style="background:gainsboro; color:black;" rowspan="2"|27/4-2020
{{Template:ProcessRunPeg1Row
|Travka20 wafer,
|RunDate =27/4-2020
|Si /  20%
|WaferInfo =Travka20 wafer
|S022329 +1min TDESC clean
|MaterialExposed=Si /  20
|nanolab/ jmli / DREM / DREM 2kW, 150 cycles or 11:00 minutes
|Tool=Peg 1
|S022330
|Conditioning=S022329 +1min TDESC clean
|Resist etch rate: 59 nm/min [http://labmanager.dtu.dk/function.php?module=Processlog&view=editlog&usageid=384373 Process log entry]
|Recipe=nanolab/ jmli / DREM / DREM 2kW, 150 cycles or 11:00 minutes
| [[file:S022330.gif |120px|frameless ]]
|WaferID=S022330
[[file:S022330 02.gif |120px|frameless ]]
|Comments=Resist etch rate: 59 nm/min [http://labmanager.dtu.dk/function.php?module=Processlog&view=editlog&usageid=384373 Process log entry]
[[file:S022330 03.gif |120px|frameless ]]
|SEMimages=[[file:S022330a073.png |120px|frameless ]][[file:S022330a074.png |120px|frameless ]][[file:S022330a075.png |120px|frameless ]][[file:S022330a076.png |120px|frameless ]][[file:S022330a077.png |120px|frameless ]][[file:S022330a078.png |120px|frameless ]][[file:S022330a079.png |120px|frameless ]][[file:S022330a080.png |120px|frameless ]][[file:S022330a081.png |120px|frameless ]][[file:S022330a082.png |120px|frameless ]][[file:S022330a083.png |120px|frameless ]][[file:S022330a084.png |120px|frameless ]][[file:S022330a085.png |120px|frameless ]][[file:S022330a086.png |120px|frameless ]]
[[file:S022330 04.gif |120px|frameless ]]
|PicoscopeImages=[[file:S022330.gif |120px|frameless ]][[file:S022330 02.gif |120px|frameless ]][[file:S022330 03.gif |120px|frameless ]][[file:S022330 04.gif |120px|frameless ]][[file:S022330 05.gif |120px|frameless ]][[file:S022330 06.gif |120px|frameless ]][[file:S022330 07.gif |120px|frameless ]][[file:S022330 08.gif |120px|frameless ]][[file:S022330 09.gif |120px|frameless ]][[file:S022330 10.gif |120px|frameless ]][[file:S022330 12.gif |120px|frameless ]][[file:S022330 13.gif |120px|frameless ]][[file:S022330 14.gif |120px|frameless ]][[file:S022330 15.gif |120px|frameless ]]
[[file:S022330 05.gif |120px|frameless ]]
}}
[[file:S022330 06.gif |120px|frameless ]]
[[file:S022330 07.gif |120px|frameless ]]
[[file:S022330 08.gif |120px|frameless ]]
[[file:S022330 09.gif |120px|frameless ]]
[[file:S022330 10.gif |120px|frameless ]]
[[file:S022330 12.gif |120px|frameless ]]
[[file:S022330 13.gif |120px|frameless ]]
[[file:S022330 14.gif |120px|frameless ]]
[[file:S022330 15.gif |120px|frameless ]]
<!-- Add picoscope links here:[[file:S022330 |120px|frameless ]] -->
<!-- [[/S022330 | Single gifs ]] -->
|
{| {{table}}  
{| {{table}}  
| align="center" style="background:#f0f0f0;"|'''SEM image:'''
| align="center" style="background:#f0f0f0;"|'''SEM image:'''
Line 223: Line 149:
|-  
|-  
|}
|}
|-
| style="background:gainsboro; color:black;" colspan="8"|
[[file:S022330a073.png |120px|frameless ]]
[[file:S022330a074.png |120px|frameless ]]
[[file:S022330a075.png |120px|frameless ]]
[[file:S022330a076.png |120px|frameless ]]
[[file:S022330a077.png |120px|frameless ]]
[[file:S022330a078.png |120px|frameless ]]
[[file:S022330a079.png |120px|frameless ]]
[[file:S022330a080.png |120px|frameless ]]
[[file:S022330a081.png |120px|frameless ]]
[[file:S022330a082.png |120px|frameless ]]
[[file:S022330a083.png |120px|frameless ]]
[[file:S022330a084.png |120px|frameless ]]
[[file:S022330a085.png |120px|frameless ]]
[[file:S022330a086.png |120px|frameless ]]
|-
| colspan="9"| .
|-
|-
! style="background:gainsboro; color:black;" rowspan="2"|27/4-2020
{{Template:ProcessRunPeg1Row
|Travka35 wafer,
|RunDate =27/4-2020
|Si /  35%
|WaferInfo =Travka35 wafer
|S022330 +1min TDESC clean
|MaterialExposed=Si /  35%
|nanolab/ jmli / DREM / DREM 2kW, 150 cycles or 11:00 minutes
|Tool=Peg 1
|S022331
|Conditioning=S022330 +1min TDESC clean
|Resist etch rate: 66 nm/min [http://labmanager.dtu.dk/function.php?module=Processlog&view=editlog&usageid=384373 Process log entry]
|Recipe=nanolab/ jmli / DREM / DREM 2kW, 150 cycles or 11:00 minutes
| [[file:S022331.gif |120px|frameless ]]
|WaferID=S022331
[[file:S022331 01.gif |120px|frameless ]]
|Comments=Resist etch rate: 66 nm/min [http://labmanager.dtu.dk/function.php?module=Processlog&view=editlog&usageid=384373 Process log entry]
[[file:S022331 02.gif |120px|frameless ]]
|SEMimages=[[file:S022331a087.png |120px|frameless ]][[file:S022331a088.png |120px|frameless ]][[file:S022331a089.png |120px|frameless ]][[file:S022331a090.png |120px|frameless ]][[file:S022331a091.png |120px|frameless ]][[file:S022331a092.png |120px|frameless ]][[file:S022331a093.png |120px|frameless ]][[file:S022331a094.png |120px|frameless ]][[file:S022331a095.png |120px|frameless ]][[file:S022331a096.png |120px|frameless ]][[file:S022331a097.png |120px|frameless ]]
[[file:S022331 03.gif |120px|frameless ]]
|PicoscopeImages=[[file:S022331.gif |120px|frameless ]][[file:S022331 01.gif |120px|frameless ]][[file:S022331 02.gif |120px|frameless ]][[file:S022331 03.gif |120px|frameless ]][[file:S022331 04.gif |120px|frameless ]][[file:S022331 05.gif |120px|frameless ]][[file:S022331 06.gif |120px|frameless ]][[file:S022331 07.gif |120px|frameless ]][[file:S022331 08.gif |120px|frameless ]][[file:S022331 09.gif |120px|frameless ]][[file:S022331 10.gif |120px|frameless ]][[file:S022331 11.gif |120px|frameless ]][[file:S022331 12.gif |120px|frameless ]][[file:S022331 13.gif |120px|frameless ]][[file:S022331 14.gif |120px|frameless ]]
[[file:S022331 04.gif |120px|frameless ]]
}}
[[file:S022331 05.gif |120px|frameless ]]
[[file:S022331 06.gif |120px|frameless ]]
[[file:S022331 07.gif |120px|frameless ]]
[[file:S022331 08.gif |120px|frameless ]]
[[file:S022331 09.gif |120px|frameless ]]
[[file:S022331 10.gif |120px|frameless ]]
[[file:S022331 11.gif |120px|frameless ]]
[[file:S022331 12.gif |120px|frameless ]]
[[file:S022331 13.gif |120px|frameless ]]
[[file:S022331 14.gif |120px|frameless ]]
<!-- Add picoscope links here:[[file:S022331 |120px|frameless ]] -->
<!-- [[/S022331 | Single gifs ]] -->
|
{| {{table}}  
{| {{table}}  
| align="center" style="background:#f0f0f0;"|'''SEM image:'''
| align="center" style="background:#f0f0f0;"|'''SEM image:'''
Line 299: Line 193:
|-  
|-  
|}
|}
|-
| style="background:gainsboro; color:black;" colspan="8"|
[[file:S022331a087.png |120px|frameless ]]
[[file:S022331a088.png |120px|frameless ]]
[[file:S022331a089.png |120px|frameless ]]
[[file:S022331a090.png |120px|frameless ]]
[[file:S022331a091.png |120px|frameless ]]
[[file:S022331a092.png |120px|frameless ]]
[[file:S022331a093.png |120px|frameless ]]
[[file:S022331a094.png |120px|frameless ]]
[[file:S022331a095.png |120px|frameless ]]
[[file:S022331a096.png |120px|frameless ]]
[[file:S022331a097.png |120px|frameless ]]
|-
| colspan="9"| .
|-
|-
! style="background:gainsboro; color:black;" rowspan="2"|27/4-2020
{{Template:ProcessRunPeg1Row
|Travka50 wafer,
|RunDate =27/4-2020
|Si /  50%
|WaferInfo =Travka50 wafer
|S022331 +1min TDESC clean
|MaterialExposed=Si /  50%
|nanolab/ jmli / DREM / DREM 2kW, 150 cycles or 11:00 minutes
|Tool=Peg 1
|S022332
|Conditioning=S022331 +1min TDESC clean
|Resist etch rate: 58 nm/min [http://labmanager.dtu.dk/function.php?module=Processlog&view=editlog&usageid=384373 Process log entry]
|Recipe=nanolab/ jmli / DREM / DREM 2kW, 150 cycles or 11:00 minutes
| [[file:S022332.gif |120px|frameless ]]
|WaferID=S022332
[[file:S022332 01.gif |120px|frameless ]]
|Comments=Resist etch rate: 58 nm/min [http://labmanager.dtu.dk/function.php?module=Processlog&view=editlog&usageid=384373 Process log entry]
[[file:S022332 02.gif |120px|frameless ]]
|SEMimages=[[file:S022332a098.png |120px|frameless ]][[file:S022332a099.png |120px|frameless ]][[file:S022332a100.png |120px|frameless ]][[file:S022332a101.png |120px|frameless ]][[file:S022332a102.png |120px|frameless ]][[file:S022332a103.png |120px|frameless ]][[file:S022332a104.png |120px|frameless ]][[file:S022332a105.png |120px|frameless ]][[file:S022332a106.png |120px|frameless ]][[file:S022332a107.png |120px|frameless ]][[file:S022332a108.png |120px|frameless ]][[file:S022332a109.png |120px|frameless ]][[file:S022332a110.png |120px|frameless ]]
[[file:S022332 03.gif |120px|frameless ]]
|PicoscopeImages=[[file:S022332.gif |120px|frameless ]][[file:S022332 01.gif |120px|frameless ]][[file:S022332 02.gif |120px|frameless ]][[file:S022332 03.gif |120px|frameless ]][[file:S022332 04.gif |120px|frameless ]][[file:S022332 05.gif |120px|frameless ]][[file:S022332 06.gif |120px|frameless ]][[file:S022332 07.gif |120px|frameless ]][[file:S022332 08.gif |120px|frameless ]][[file:S022332 09.gif |120px|frameless ]][[file:S022332 10.gif |120px|frameless ]][[file:S022332 11.gif |120px|frameless ]][[file:S022332 12.gif |120px|frameless ]][[file:S022332 13.gif |120px|frameless ]]
[[file:S022332 04.gif |120px|frameless ]]
}}
[[file:S022332 05.gif |120px|frameless ]]
[[file:S022332 06.gif |120px|frameless ]]
[[file:S022332 07.gif |120px|frameless ]]
[[file:S022332 08.gif |120px|frameless ]]
[[file:S022332 09.gif |120px|frameless ]]
[[file:S022332 10.gif |120px|frameless ]]
[[file:S022332 11.gif |120px|frameless ]]
[[file:S022332 12.gif |120px|frameless ]]
[[file:S022332 13.gif |120px|frameless ]]
<!-- Add picoscope links here:[[file:S022332 |120px|frameless ]] -->
<!-- [[/S022332 | Single gifs ]] -->
|
{| {{table}}  
{| {{table}}  
| align="center" style="background:#f0f0f0;"|'''SEM image:'''
| align="center" style="background:#f0f0f0;"|'''SEM image:'''
Line 371: Line 237:
|-  
|-  
|}
|}
|-  
|-
| style="background:gainsboro; color:black;" colspan="8"|
{{Template:ProcessRunPeg1Row
[[file:S022332a098.png |120px|frameless ]]
|RunDate =27/4-2020
[[file:S022332a099.png |120px|frameless ]]
|WaferInfo =Travka65 wafer
[[file:S022332a100.png |120px|frameless ]]
|MaterialExposed=Si /  65%
[[file:S022332a101.png |120px|frameless ]]
|Tool=Peg 1
[[file:S022332a102.png |120px|frameless ]]
|Conditioning=S022332 +1min TDESC clean
[[file:S022332a103.png |120px|frameless ]]
|Recipe=nanolab/ jmli / DREM / DREM 2kW, 150 cycles or 11:00 minutes
[[file:S022332a104.png |120px|frameless ]]
|WaferID=S022333
[[file:S022332a105.png |120px|frameless ]]
|Comments=Resist etch rate: 58 nm/min [http://labmanager.dtu.dk/function.php?module=Processlog&view=editlog&usageid=384373 Process log entry]
[[file:S022332a106.png |120px|frameless ]]
|SEMimages=[[file:S022333a111.png |120px|frameless ]][[file:S022333a112.png |120px|frameless ]][[file:S022333a113.png |120px|frameless ]][[file:S022333a114.png |120px|frameless ]][[file:S022333a115.png |120px|frameless ]][[file:S022333a116.png |120px|frameless ]][[file:S022333a117.png |120px|frameless ]][[file:S022333a118.png |120px|frameless ]][[file:S022333a119.png |120px|frameless ]][[file:S022333a120.png |120px|frameless ]][[file:S022333a121.png |120px|frameless ]][[file:S022333a122.png |120px|frameless ]][[file:S022333a123.png |120px|frameless ]][[file:S022333a124.png |120px|frameless ]]
[[file:S022332a107.png |120px|frameless ]]
|PicoscopeImages=[[file:S022333.gif |120px|frameless ]][[file:S022333 01.gif |120px|frameless ]][[file:S022333 02.gif |120px|frameless ]][[file:S022333 03.gif |120px|frameless ]][[file:S022333 04.gif |120px|frameless ]][[file:S022333 05.gif |120px|frameless ]][[file:S022333 06.gif |120px|frameless ]][[file:S022333 07.gif |120px|frameless ]][[file:S022333 08.gif |120px|frameless ]][[file:S022333 09.gif |120px|frameless ]][[file:S022333 10.gif |120px|frameless ]][[file:S022333 11.gif |120px|frameless ]][[file:S022333 12.gif |120px|frameless ]][[file:S022333 13.gif |120px|frameless ]][[file:S022333 14.gif |120px|frameless ]]
[[file:S022332a108.png |120px|frameless ]]
}}
[[file:S022332a109.png |120px|frameless ]]
[[file:S022332a110.png |120px|frameless ]]
|-
| colspan="9"| .


|-
! style="background:gainsboro; color:black;" rowspan="2"|27/4-2020
|Travka65 wafer,
|Si /  65%
|S022332 +1min TDESC clean
|nanolab/ jmli / DREM / DREM 2kW, 150 cycles or 11:00 minutes
|S022333
|Resist etch rate: 58 nm/min [http://labmanager.dtu.dk/function.php?module=Processlog&view=editlog&usageid=384373 Process log entry]
| [[file:S022333.gif |120px|frameless ]]
[[file:S022333 01.gif |120px|frameless ]]
[[file:S022333 02.gif |120px|frameless ]]
[[file:S022333 03.gif |120px|frameless ]]
[[file:S022333 04.gif |120px|frameless ]]
[[file:S022333 05.gif |120px|frameless ]]
[[file:S022333 06.gif |120px|frameless ]]
[[file:S022333 07.gif |120px|frameless ]]
[[file:S022333 08.gif |120px|frameless ]]
[[file:S022333 09.gif |120px|frameless ]]
[[file:S022333 10.gif |120px|frameless ]]
[[file:S022333 11.gif |120px|frameless ]]
[[file:S022333 12.gif |120px|frameless ]]
[[file:S022333 13.gif |120px|frameless ]]
[[file:S022333 14.gif |120px|frameless ]]
<!-- Add picoscope links here:[[file:S022333 |120px|frameless ]] -->
<!-- [[/S022333 | Single gifs ]] -->
|
{| {{table}}  
{| {{table}}  
| align="center" style="background:#f0f0f0;"|'''SEM image:'''
| align="center" style="background:#f0f0f0;"|'''SEM image:'''
Line 449: Line 285:
|-  
|-  
|}
|}
|-
| style="background:gainsboro; color:black;" colspan="8"|
[[file:S022333a111.png |120px|frameless ]]
[[file:S022333a112.png |120px|frameless ]]
[[file:S022333a113.png |120px|frameless ]]
[[file:S022333a114.png |120px|frameless ]]
[[file:S022333a115.png |120px|frameless ]]
[[file:S022333a116.png |120px|frameless ]]
[[file:S022333a117.png |120px|frameless ]]
[[file:S022333a118.png |120px|frameless ]]
[[file:S022333a119.png |120px|frameless ]]
[[file:S022333a120.png |120px|frameless ]]
[[file:S022333a121.png |120px|frameless ]]
[[file:S022333a122.png |120px|frameless ]]
[[file:S022333a123.png |120px|frameless ]]
[[file:S022333a124.png |120px|frameless ]]
|-
| colspan="9"| .
|-
|-
! style="background:gainsboro; color:black;" rowspan="2"|27/4-2020
{{Template:ProcessRunPeg1Row
|Travka80 wafer,
|RunDate =27/4-2020
|Si /  80%
|WaferInfo =Travka80 wafer
|S022333 + 1min TDESC clean
|MaterialExposed=Si /  80%
|nanolab/ jmli / DREM / DREM 2kW nano, 150 cycles or 11:00 minutes
|Tool=Peg 1
|S022334
|Conditioning=S022333 + 1min TDESC clean
|Resist etch rate: 79 nm/min [http://labmanager.dtu.dk/function.php?module=Processlog&view=editlog&usageid=384373 Process log entry]
|Recipe=nanolab/ jmli / DREM / DREM 2kW nano, 150 cycles or 11:00 minutes
| [[file:S022334.gif |120px|frameless ]]
|WaferID=S022334
[[file:S022334 01.gif |120px|frameless ]]
|Comments=Resist etch rate: 79 nm/min [http://labmanager.dtu.dk/function.php?module=Processlog&view=editlog&usageid=384373 Process log entry]
[[file:S022334 02.gif |120px|frameless ]]
|SEMimages=[[file:S022334a125.png |120px|frameless ]][[file:S022334a126.png |120px|frameless ]][[file:S022334a127.png |120px|frameless ]][[file:S022334a128.png |120px|frameless ]][[file:S022334a129.png |120px|frameless ]][[file:S022334a130.png |120px|frameless ]][[file:S022334a131.png |120px|frameless ]][[file:S022334a132.png |120px|frameless ]][[file:S022334a133.png |120px|frameless ]][[file:S022334a134.png |120px|frameless ]][[file:S022334a135.png |120px|frameless ]][[file:S022334a136.png |120px|frameless ]]
[[file:S022334 03.gif |120px|frameless ]]
|PicoscopeImages= [[file:S022334.gif |120px|frameless ]][[file:S022334 01.gif |120px|frameless ]][[file:S022334 02.gif |120px|frameless ]][[file:S022334 03.gif |120px|frameless ]][[file:S022334 04.gif |120px|frameless ]][[file:S022334 05.gif |120px|frameless ]][[file:S022334 06.gif |120px|frameless ]][[file:S022334 07.gif |120px|frameless ]][[file:S022334 08.gif |120px|frameless ]][[file:S022334 09.gif |120px|frameless ]][[file:S022334 10.gif |120px|frameless ]][[file:S022334 11.gif |120px|frameless ]][[file:S022334 12.gif |120px|frameless ]][[file:S022334 13.gif |120px|frameless ]][[file:S022334 14.gif |120px|frameless ]]
[[file:S022334 04.gif |120px|frameless ]]
}}
[[file:S022334 05.gif |120px|frameless ]]
[[file:S022334 06.gif |120px|frameless ]]
[[file:S022334 07.gif |120px|frameless ]]
[[file:S022334 08.gif |120px|frameless ]]
[[file:S022334 09.gif |120px|frameless ]]
[[file:S022334 10.gif |120px|frameless ]]
[[file:S022334 11.gif |120px|frameless ]]
[[file:S022334 12.gif |120px|frameless ]]
[[file:S022334 13.gif |120px|frameless ]]
[[file:S022334 14.gif |120px|frameless ]]
<!-- Add picoscope links here:[[file:S022333 |120px|frameless ]] -->
<!-- [[/S022334 | Single gifs ]] -->
|
{| {{table}}  
{| {{table}}  
| align="center" style="background:#f0f0f0;"|'''SEM image:'''
| align="center" style="background:#f0f0f0;"|'''SEM image:'''
Line 525: Line 330:
|-  
|-  
|}
|}
|-
|-
| style="background:gainsboro; color:black;" colspan="8"|
[[file:S022334a125.png |120px|frameless ]]
[[file:S022334a126.png |120px|frameless ]]
[[file:S022334a127.png |120px|frameless ]]
[[file:S022334a128.png |120px|frameless ]]
[[file:S022334a129.png |120px|frameless ]]
[[file:S022334a130.png |120px|frameless ]]
[[file:S022334a131.png |120px|frameless ]]
[[file:S022334a132.png |120px|frameless ]]
[[file:S022334a133.png |120px|frameless ]]
[[file:S022334a134.png |120px|frameless ]]
[[file:S022334a135.png |120px|frameless ]]
[[file:S022334a136.png |120px|frameless ]]
|-
| colspan="9"| .
|-  
|}
|}


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