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'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Cleanroom_Chemicals click here]'''
=Chemicals in the Cleanroom (B346)=


=<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]]=
<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION.</span>


This page lists the chemicals that are made available in the cleanroom by Nanolab, covered by the cleanroom access hourly rate.  
This page lists the chemicals that are made available in the cleanroom by Nanolab, covered by the cleanroom access hourly rate.  
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=Developers=
=Developers=
*AR 600-546 (Amyl acetate). Stored in E-4?
*AR 600-546 (Amyl acetate). Stored in E-4
*AZ 351B (NaOH based with disodium tetraborate buffer). Stored in E-4.
*AZ 351B (NaOH based with disodium tetraborate buffer). Stored in E-4.
*AZ 726 MIF (TMAH based with surfactants added for fast and homogeneous substrate wetting). Stored in E-4.
*AZ 726 MIF (TMAH based with surfactants added for fast and homogeneous substrate wetting). Stored in E-4.
*mr-Dev 600 (PGMEA). Stored in Bx1.
*mr-Dev 600 (PGMEA). Stored in Bx1. Or E-4?
*ZED-N50 (n-Amylacetate). Stored in E-4.
*ZED-N50 (n-Amylacetate). Stored in E-4.


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*Ethanol. Stored in C-1, D-3, E-4.
*Ethanol. Stored in C-1, D-3, E-4.
*MIBK. Stored in E-4.
*MIBK. Stored in E-4.
*PGMEA (available as mr-Dev 600). Stored in Bx1.
*PGMEA (available as mr-Dev 600). Stored in Bx1. Or E-4?
*Remover 1165 (NMP). Stored in D-3, E-4.
*Remover 1165 (NMP). Stored in D-3, E-4.


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=Missing from list?=
=Missing from list?=
*Rinse T1100 (Mixture of Mesitylin, 1,2,4-Trimethylbenzene)?
*AP3000?
*APS-100 (Ammonium persulfate based copper etch)?
*AZ 400K (KOH based with Potassium borate buffer)?
*Ethyl Acetate?
*Ethyl Acetate?
*HSQ?
*HSQ?
*Rinse T1100 (Mixture of Mesitylin, 1,2,4-Trimethylbenzene)?
*UVN2300?
*UVN2300?
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