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| | '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_Magnesium click here]''' |
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| =Deposition of Magnesium= | | =Deposition of Magnesium= |
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| *At Penn State they used a cryo pump with Mg e-beam evaporation for many experiments (at least 2 students and several papers) apparently without issues with the pump. | | *At Penn State they used a cryo pump with Mg e-beam evaporation for many experiments (at least 2 students and several papers) apparently without issues with the pump. |
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| ===Barbara Shaw, Penn State University ===
| | *More detailed info may be found in [https://labintra.nanolab.dtu.dk/index.php?title=Main_Page/Application_Notes/Thin_film_deposition/Magnesium_deposition LabIntra] (requires login). |
| E-beam evaporation of Mg
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| *Best w dedicated system for Mg, the Nanofab lab at Penn State doesn’t allow Mg. | |
| *Recommend major cleaning prior to Mg, predeposit a bunch of Mg. Major clean afterwards and predeposit next material too. Sounds like their system hasn’t been used for other stuff after Mg, so no experience with that.
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| *They had no issues w Mg and their cryo pump as far as she knows.
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| ===Michael Störmer, Helmholtz-Zentrum Geesthacht Zentrum für Material- und Küstenforschung ===
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| Sputter deposition and also cathode arc and ion beam sputtering of Mg
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| *Mg challenging, different to other metals. Oxidizes easily - think about the environment for the prepared films.
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| *On cross-contamination: You see the effect of Mg on the base pressure, as you do for Ti coatings, Michael doesn’t think it’s a long-lasting effect. But - don’t underestimate cleanliness.
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| *It is possible to contact them and visit their lab. They have a lot of expertise on Mg.
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| ===Diederik Depla, Ghent University=== | |
| Sputtering including HiPIMS of Mg
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| *Mainly used their setup for Mg, haven’t checked cross-contamination.
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| *Believes that Mg on vent will turn into MgO (stable/low-sputter-yield) which should not be a big problem in terms of contamination
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| *They used a turbo/rotary vane pump, no specific reason.
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| *Mg sputters easily, easy to handle targets compared to Ca and Li (sic!). During non-reactive sputtering, MgO will form on target but Mg sputters so fast it’s not a big issue.
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