LabAdviser/Courses/TPT Thin Film: Difference between revisions

Latest revision as of 09:35, 5 April 2024

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Thin Film TPT

DTU Nanolab offers a Tool Package Training (TPT) course in thin film growth and deposition techniques.

Users that have to use any thin film growth and/or deposition tools in the cleanroom will have to sign up for the lectures, before they apply for a training (i.e. it is possible to get a training and then attend the lectures afterwards).

Thin film tool package training (TPT)
Schedule	Theoretical part 1^st lecture (2 - 2½ hours): Introduction to thin films Thin film formation Material properties Overview of the techniques LabAdviser PVD (physical Vapour Deposition) General notes on PVD Resistive thermal evaporation E-beam Evaporation Sputtering The next lecture will be held on the 17th of April 2024 from 10-12 The lecture will be held in room 011 in building 451. Sign up for the next lecture here in DTU Learn: https://learn.inside.dtu.dk/d2l/le/discovery/view/course/56079. In DTU Learn, you first have to sign yourself up for the course and then enroll yourself in each of the two lectures under “Groups”. You can also send an email to thinfilm@nanolab.dtu.dk, if you want to attend the lecture. Please note that the Thin Film TPT course is mandatory for all new users that need to use thin film tools in the cleanroom, but it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk. 2^nd lecture (3 - 3½ hours): Thermal Oxidation CVD (Chemical Vapour Deposition): LPCVD (Low Pressure Chemical Vapour Deposition) PECVD (Plasma Enhanced Chemical Vapour Deposition) ALD (Atomic Layer Deposition) Thermal ALD Plasma Enhanced ALD Comparison of thin film techniques The next lecture will be held on the 19th of April 2024 from 9-12. The lecture will be held in room 043 in building 345B. Sign up for the next lecture here in DTU Learn: https://learn.inside.dtu.dk/d2l/le/discovery/view/course/56079. In DTU Learn, you first have to sign yourself up for the course and then enroll yourself in each of the two lectures under “Groups”. You can also send an email to thinfilm@nanolab.dtu.dk, if you want to attend the lecture. Please note that the Thin Film TPT course is mandatory for all new users that need to use thin film tools in the cleanroom, but it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk. Practical part None
Location	Theoretical part The locations for the lectures will be notified in the Doodles
Qualified prerequisites	None
Preparations	No preparation is required. However, a good overview of thin film processes can be found in Sami Franssila "Introduction to Microfabrication" (2010), Chapter 5: Thin-Film Materials and Processes (requires login). Links to more literature about thin films can be found below.
Course responsible	The Thin Film group at DTU Nanolab (thinfilm@nanolab.dtu.dk)
Learning goals	Be aware of relevant material properties for thin films made in the cleanroom Understand different thin film techniques Compare and be able to select appropriate thin film technique

Presentations from the lectures

Slides from the 1^st lecture

See LabManager (requires a login)

Slides from the 2^nd lecture

See LabManager (requires a login).

Literature

Some literature about thin films can be found here (requires a login):

Introduction to thin films

Thermal oxidation

S. Franssila, (2010), Introduction to Microfabrication, Chapter 13: Thermal Oxidation

@@ Line 1: / Line 1: @@
 '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/Courses/TPT_Thin_Film click here]'''
+''This page is written by DTU Nanolab internal''
 ==Thin Film TPT ==
@@ Line 5: / Line 7: @@
 DTU Nanolab offers a Tool Package Training (TPT) course in thin film growth and deposition techniques.
-Users that have to use any thin film growth and/or deposition tools in the cleanroom will have to sign up for the lectures before they apply for a training (i.e. it is possible to get a training and then attend the lectures afterwards).
+Users that have to use any thin film growth and/or deposition tools in the cleanroom will have to sign up for the lectures, before they apply for a training (i.e. it is possible to get a training and then attend the lectures afterwards).
 {|border="1" cellspacing="0" cellpadding="3" align="left" style="text-align:left;" style="width: 70%;"
@@ Line 18: / Line 20: @@
 !Schedule
 |
-<b>Theoretical part</b>
+===<b>Theoretical part</b>===
+<br>
+'''1<sup>st</sup> lecture (2 - 2½ hours):'''
+*Introduction to thin films
+**Thin film formation
+**Material properties
+**Overview of the techniques
+**LabAdviser
+*PVD (physical Vapour Deposition)
+**General notes on PVD
+**Resistive thermal evaporation
+**E-beam Evaporation
+**Sputtering
+<!--
+*Introduction to thin films
+*Before you start - Material properties to consider
+*Overview of thin film techniques at DTU Nanolab
+*Equipment overview in LabAdviser
+*Thin film techniques – 1<sup>st</sup> part:
+**Thermal oxidation
+-->
-'''1<sup>st</sup> lecture (2 hours):'''
+<i>
-*An introduction to thin films
+The next lecture will be held on the 17th of April 2024 from 10-12 The lecture will be held in room 011 in building 451.
-*Material properties
-*Overview of different thin film techniques at DTU Nanolab – 1<sup>st</sup> part:
-**Thermal oxidation
-**Electroplating
-<i>Sign up for the next lecture here: https://danchip.doodle.com/poll/k4pdm2n4bpseww5e.
+Sign up for the next lecture here in DTU Learn: https://learn.inside.dtu.dk/d2l/le/discovery/view/course/56079.
-The next lecture will be held online (using Zoom) on the 28th of June from 10.00 to 12.30</i>
+In DTU Learn, you first have to sign yourself up for the course and then enroll yourself in each of the two lectures under “Groups”.
-<!-- The date will come after the summer vaction-->
-'''2<sup>nd</sup> lecture (3 hours):'''
+You can also send an email to thinfilm@nanolab.dtu.dk, if you want to attend the lecture.
-*Vacuum basics
-*Overview of different thin film techniques at DTU Nanolab – 2<sup>nd</sup>  part:
+Please note that the Thin Film TPT course is mandatory for all new users that need to use thin film tools in the cleanroom, but it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.</i>
-*PVD (physical vapour deposition)
-**E-beam evaporation
+<!--https://nanolab.doodle.com/poll/k4pdm2n4bpseww5e.
-**Thermal evaporation
-**Sputtering
+If you cannot wait until September to join the lecture, then send an email to thinfilm@nanolab.dtu.dk.-->
-*CVD (chemical vapour depostion)
-**LPCVD (low pressure chemical vapour deposition)
+<!-- If you cannot wait until September to join the lecture, then send an email to thinfilm@nanolab.dtu.dk. There is a chance that we can arrange a lecture in August, if more people wants to attend this, or that we can make a video of the lecture.-->
-**PECVD (plasma enhanced chemical vapour deposition)
-*ALD (atomic layer deposition)
+'''2<sup>nd</sup> lecture (3 - 3½ hours):'''
+*Thermal Oxidation
+*CVD (Chemical Vapour Deposition):
+**LPCVD (Low Pressure Chemical Vapour Deposition)
+**PECVD (Plasma Enhanced Chemical Vapour Deposition)
+*ALD (Atomic Layer Deposition)
+**Thermal ALD
+**Plasma Enhanced ALD
+*Comparison of thin film techniques
+<!--
+*Thin film techniques – 2<sup>nd</sup>  part:
+**PVD (physical vapour deposition)
+***E-beam evaporation
+***Thermal evaporation
+***Sputtering
+**CVD (chemical vapour depostion)
+***LPCVD (low pressure chemical vapour deposition)
+***PECVD (plasma enhanced chemical vapour deposition)
+**ALD (atomic layer deposition)
+-->
+<i>The next lecture will be held on the 19th of April 2024 from 9-12. The lecture will be held in room 043 in building 345B.
+Sign up for the next lecture here in DTU Learn: https://learn.inside.dtu.dk/d2l/le/discovery/view/course/56079.
+In DTU Learn, you first have to sign yourself up for the course and then enroll yourself in each of the two lectures under “Groups”.
+You can also send an email to thinfilm@nanolab.dtu.dk, if you want to attend the lecture.
+Please note that the Thin Film TPT course is mandatory for all new users that need to use thin film tools in the cleanroom, but it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.
-<i>Sign up for the next lecture here: https://danchip.doodle.com/poll/4r3ydwzzbrdepgpf
+<!-- Please note that it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.</i>
-The next lecture will be held online (using Zoom) on the 4th of June from 9.00 to 12.30 </i>
+If you cannot wait until September to join the lecture, then send an email to thinfilm@nanolab.dtu.dk. There is a chance that we can arrange a lecture in August, if more people wants to attend this, or that we can make a video of the lecture.-->
-<!--The date will come after the summer vaction</i>-->
-<b>Practical part</b>
+===<b>Practical part</b>===
 * None
 |-
@@ Line 57: / Line 105: @@
 |
 '''Theoretical part'''
-* The location of the lectures will be notified in the doodles
+The locations for the lectures will be notified in the Doodles
 |-
@@ Line 64: / Line 113: @@
 !Qualified prerequisites
 |
-* None
+None
 |-
@@ Line 70: / Line 119: @@
 !Preparations
 |
-* Read [http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch5/pdf Sami Franssila "Introduction to Microfabrication" (2010), Chapter 5: Thin-Film Materials and Processes] (Available online from DTU campus).
+No preparation is required.
+However, a good overview of thin film processes can be found in [http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch5/pdf Sami Franssila "Introduction to Microfabrication" (2010), Chapter 5: Thin-Film Materials and Processes] (requires login).
+Links to more literature about thin films can be found below.
 |-
@@ Line 76: / Line 129: @@
 !Course responsible
 |
-*The Thin Film group at DTU Nanolab (thinfilm@nanolab.dtu.dk)
+The Thin Film group at DTU Nanolab (thinfilm@nanolab.dtu.dk)
 |-
@@ Line 83: / Line 136: @@
 |
 *Be aware of relevant material properties for thin films made in the cleanroom
-*Understand importance of correct process pressure (for vacuum processes)
 *Understand different thin film techniques
 *Compare and be able to select appropriate thin film technique
@@ Line 91: / Line 143: @@
 <br clear="all" />
-===Material for preparations and further information===
+==Presentations from the lectures==
-====Slides from the lectures====
+<big>Slides from the 1<sup>st</sup> lecture</big>
+*[https://labmanager.dtu.dk/function.php?module=MiscDocument&view=docs&page_id=387f  See LabManager (requires a login)]
+<!--[[Media:1_DTU_Nanolab_Thin_Film_TPT_final_April_2023.pptx]]-->
-<big>Slides from lecture 1</big>
+<big>Slides from the 2<sup>nd</sup> lecture</big>
-*Lecture slide show [[Media:1_DTU_Nanolab_Thin_Film_TPT_final_May_2020.pptx‎]]
+*[https://labmanager.dtu.dk/function.php?module=MiscDocument&view=docs&page_id=387f  See LabManager (requires a login)].
+<!--[[Media:2_DTU_Nanolab_Thin_Film_TPT_final_May2023.pptx]]-->
-<big>Slides from lecture 2</big>
+==Literature==
-*Lecture slide show [[Media:2_DTU_Nanolab_Thin_Film_TPT_final_May_2020.pptx]]
-====Literature====
+Some literature about thin films can be found here (requires a login):
+====Introduction to thin films====
 *[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch5/pdf  S. Franssila, (2010), Introduction to Microfabrication, Chapter 5: Thin-Film Materials and Processes]
 *[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch7/pdf  S. Franssila, (2010), Introduction to Microfabrication, Chapter 7: Advanced Thin Films]
 *[https://www.sciencedirect.com/science/article/pii/B9780815520375000101 D. M. Mattox,(2015) Handbook of Physical Vapor Deposition (PVD) Processing (Second Edition), Chapter 10: Atomistic Film Growth and Some Growth-Related Film Properties]
 *[https://link.springer.com/content/pdf/10.1007%2F978-3-662-05179-5.pdf  K. Oura et al., (2003), Surface Science, Chapter 14: Growth of Thin Films]
+====Thermal oxidation====
+*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch13/pdf  S. Franssila, (2010), Introduction to Microfabrication, Chapter 13: Thermal Oxidation]
+====Stress in thin films====
+*[https://avs.scitation.org/doi/10.1116/1.5011790 Journal of Vacuum Science & Technology A 36, 020801 (2018) Review Article: Stress in thin films and coatings: Current status, challenges, and prospects]
+*[https://www.bruker.com/fileadmin/user_upload/8-PDF-Docs/SurfaceAnalysis/StylusProfilometry/ApplicationNotes/AN516-Thin_Film_Stress_Measurement_Using_Dektak_Stylus_P.pdf Dektak stress measurements]