Specific Process Knowledge/Characterization/Optical microscope: Difference between revisions

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=<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]]=
'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Optical_microscope click here]'''  
'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Optical_microscope click here]'''  
''This page is written by DTU Nanolab  internal''


[[Category: Equipment|Characterization Optical mi]]
[[Category: Equipment|Characterization Optical mi]]
[[Category: Characterization|Optical mi]]
[[Category: Characterization|Optical mi]]


 
{|border="1" cellspacing="1" cellpadding="3" style="text-align:left;"
{| border="1" cellspacing="0" cellpadding="3"  
!
! Zeiss Jenatech (strain)
! Nikon SMZ 1500
! Leica S8 APO
! Leitz Medilux
! Zeiss Axiotron 2
! Zeiss Jenatech (particles measurements)
! Noco IR microscope
! Nikon SMZ 1000
! Nikon ME 600
! Nikon Eclipse L200
! Nikon Eclipse L200 (2)
! Nikon ECLIPSE L200N 3
! Nikon ECLIPSE L200N 4
|-
|-
|-style="background:white; color:black; vertical-align:middle; text-align:center;"
|
|
|[[image:Zeiss Jenatech strain.jpg|100x100px|thumb|left]]
!Nikon SMZ 1000
[[image:Zeiss Jenatech strain_1.jpg|100x100px|thumb|left]]
!Noco IR
|[[image:Nikon SMZ 1500.jpg|100x100px|thumb|left]]
!Leica INM 100
|[[image:Leica S8 APO.jpg|100x100px|thumb|left]]
!Zeiss Jenatech
|[[image:Leitz Medilux.jpg|100x100px|thumb|left]]
!Nikon Eclipse L200 #1
|[[image:Zeiss Axiotron.jpg|100x100px|thumb|left]]
!Nikon Eclipse L200 #2
[[image:Zeiss Axiotron_1.jpg|100x100px|thumb|left]]
!Nikon Eclipse L200N #3
|[[image:Zeiss Jenatech particle measurement_2.jpg|100x100px|thumb|left]]
!Nikon Eclipse L200N #4
[[image:Zeiss Jenatech particle measurement_1.jpg|100x100px|thumb|left]]
!Nikon ME 600
|[[image:Noco IR microscope.jpg|100x100px|thumb|left]]
!Leica S8 APO
[[image:Noco IR microscope_1.jpg|100x100px|thumb|left]]
!Zeiss Axiotron
|[[image:Nikon SMZ 1000.jpg|100x100px|thumb|left]]
|-
||[[image:Nikon ME 600.jpg|100x100px|thumb|left]]
[[image:Nikon ME 600_1.jpg|100x100px|thumb|left]]
|[[image:Nikon Eclipse L200.jpg|100x100px|thumb|left]]
[[image:Nikon Eclipse L200_1.jpg|100x100px|thumb|left]]
|[[image:Nikon Eclipse L200 2_1.jpg|100x100px|thumb|left]]
[[image:Nikon Eclipse L200 2.jpg|100x100px|thumb|left]]
|[[File:Nikon Eclipse L 200 3_1.jpg|100x100px|thumb|left]]
|[[File:Nikon Eclipse L 200 4_1.jpg|100x100px|thumb|left]]
|-
|'''Location'''
|Check LabManager
|Check LabManager
|Check LabManager
|Check LabManager
|Check LabManager
|Check LabManager
|Check LabManager
|Check LabManager
|Check LabManager
|Check LabManager
|Check LabManager
|Check LabManager
|Check LabManager
|-  
|'''Special features'''
|Wollastron prism
|Stereoscopic microscope
|Stereoscopic microscope


|No
|No
|No
|Infra red (IR) camera
|Stereoscopic microscope
|Wollastron prism
|Motorized stage
[[Specific_Process_Knowledge/Characterization/Optical microscope/Nikon Eclipse L200 auto scan guide|auto scan guide]]
|No
|No
|No
|-
|-
|'''Ocular magnification'''
|-style="background:white; color:black; vertical-align:middle; text-align:center;"
|10x
|
|No
|[[image:Nikon SMZ 1000.jpg|100x100px|thumb|center]]
|No
|[[image:Noco IR microscope.jpg|100x100px|thumb|center]][[image:Noco IR microscope_1.jpg|100x100px|thumb|center]]
|10x
|[[image:LeicaINM100.jpg|100x100px|thumb|center]]
|10x
|[[image:Zeiss Jenatech strain.jpg|100x100px|thumb|center]][[image:Zeiss Jenatech strain_1.jpg|100x100px|thumb|center]]
|10x
|[[image:Nikon Eclipse L200.jpg|100x100px|thumb|center]][[image:Nikon Eclipse L200_1.jpg|100x100px|thumb|center]]
|10x
|[[image:Nikon Eclipse L200 2.jpg|100x100px|thumb|center]][[image:Nikon Eclipse L200 2_1.jpg|100x100px|thumb|center]]
|No
|[[image:Nikon Eclipse L 200 3_1.jpg|100x100px|thumb|center]]
|10x
|[[image:Nikon Eclipse L 200 4_1.jpg|100x100px|thumb|center]]
|10x
|[[image:Nikon ME 600.jpg|100x100px|thumb|center]][[image:Nikon ME 600_1.jpg|100x100px|thumb|center]]
|10x
|[[image:Leica S8 APO.jpg|100x100px|thumb|center]]
|10x
|[[image:Zeiss Axiotron.jpg|100x100px|thumb|center]][[image:Zeiss Axiotron_1.jpg|100x100px|thumb|center]]
|10x
|-
|'''Objective magnification'''
|2.5x, 5x, 10x, 20x, 50x
|Zoom 100x
|Zoom 80x
|2.5x, 5x, 10x, 20x, 50x
|5x, 10x, 20x, 50x
|5x, 10x, 20x, 50x, 100x
|2.5x, 5x, 20x, 50x
|Zoom 100x
|5x, 10x, 20x, 50x, 100x
|2.5x, 5x, 10x, 20x, 50x, 100x
|2.5x, 5x, 10x, 20x, 50x, 100x
|2.5x, 5x, 10x, 20x, 50x, 100x
|2.5x, 5x, 10x, 20x, 50x, 100x
|-
|'''Bright field'''
|Yes
|No
|No
|Yes
|Yes
|Yes
|Yes
|No
|Yes
|Yes
|Yes
|Yes
|Yes
|-
|'''Dark field'''
|Yes
|No
|No
|No
|Yes
|Yes
|No
|No
|Yes
|Yes
|Yes
|Yes
|Yes
|-
|'''Polarizer'''
|Yes
|No
|No
|No
|No
|Yes
|No
|No
|Yes
|No
|No
|No
|No
|-
|'''Episcopic light (reflected light)'''
|Yes
|Yes
|Yes
|Yes
|Yes
|Yes
|Yes
|Yes
|Yes
|Yes
|Yes
|Yes
|Yes
|-
|'''Diascopic light (transmitted light)'''
|No
|Yes
|No
|Yes
|Yes
|No
|Yes
|No
|No
|Yes
|Yes
|Yes
|Yes
|-
|-
|'''View with eye'''
|Yes
|Yes
|Yes
|Yes
|Yes
|Yes
|Yes
|Yes
|Yes
|Yes
|Yes
|Yes
|Yes
|-
|'''View on screen (camera)'''
|Yes
|No
|No
|Yes
|Yes
|No
|Yes (IR)
|No
|Yes
|Yes
|Yes
|Yes
|Yes
|-
|'''Measurement option'''
|No
|No
|No
|No
|Yes
|No
|No
|No
|No
|Yes
|Yes
|Yes
|Yes
|-
|}
It is possible to make an automated scanning of a full wafer on the Nikon Eclipse L200 with motorized stage '''[[Specific_Process_Knowledge/Characterization/Optical microscope/Nikon Eclipse L200 auto scan guide|Nikon Eclipse L200 auto scan guide]]'''
=<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]]=


{|border="1" cellspacing="1" cellpadding="3" style="text-align:left;"
|-
|-
|-style="background:white; color:black; vertical-align:middle; text-align:center;"
|-style="background:LightGrey; color:black; vertical-align:middle; text-align:left;"
!Microscope
!Location
!Location
!Responsible Group
|346-901
!Objectives
|346-901
!Ocular
|346-901
!Special features
|cleanroom A1
!Features
|cleanroom D3
!Camera
|cleanroom F3
!Analysis software
|cleanroom E4
|cleanroom E5
|cleanroom F1
|cleanroom Cx1
|cleanroom D3
|-
|-


|-
|-
|-style="background:LightGrey; color:black; vertical-align:middle; text-align:center;"
|-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:left;"
!Nikon SMZ 1000[[image:Nikon SMZ 1000.jpg|100x100px|thumb|center]]
!Responsible group
|346-901
|Wet chemistry
|Wet chemistry
|Wet chemistry
|Wet chemistry
|Zoom 0.8x - 8x
|Lithography
|10x
|Lithography
|Stereoscopic microscope
|Lithography
|Episcopic
|Lithography
|No
|Lithography
|No
|Lithography
|Lithography
|Lithography
|-
|-


|-
|-
|-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:center;"
|-style="background:LightGrey; color:black; vertical-align:middle; text-align:left;"
!Noco IR[[image:Noco IR microscope.jpg|100x100px|thumb|center]][[image:Noco IR microscope_1.jpg|100x100px|thumb|center]]
!Objectives
|346-901
|Zoom 0.8x - 8x
|Wet chemistry
|
|
*2.5x
*2.5x
Line 271: Line 80:
*20x
*20x
*50x
*50x
|10x
|IR imaging
|
*Polarizer
*Episcopic
*Diascopic
*Brightfield
|IR camera
|No
|-
|-
|-style="background:LightGrey; color:black; vertical-align:middle; text-align:center;"
!Leica INM100[[image:Nikon SMZ 1000.jpg|100x100px|thumb|center]]
|346-901
|Wet chemistry
|
|
*2.5x
*2.5x
Line 293: Line 86:
*20x
*20x
*50x
*50x
|10x
|
|
*5x
*10x
*20x
*50x
*100x
|
|
*Episcopic
*2.5x
*Diascopic
*5x
*Brightfield
*10x
*Darkfield
*20x
|DS-Fi2
*50x
|NIS-D
|-
 
|-
|-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:center;"
!Nikon Eclipse L200 #2[[image:Nikon Eclipse L200 2.jpg|100x100px|thumb|center]][[image:Nikon Eclipse L200 2_1.jpg|100x100px|thumb|center]]
|C1
|Thin Film
|
|
*2.5x
*2.5x
Line 316: Line 105:
*50x
*50x
*100x
*100x
|10x
|
|
*Episcopic
*Diascopic
*Brightfield
*Darkfield
|DS-Fi1
|NIS-D
|-
|-
|-style="background:LightGrey; color:black; vertical-align:middle; text-align:center;"
!Zeiss Jenatech[[image:Zeiss Jenatech strain.jpg|100x100px|thumb|center]][[image:Zeiss Jenatech strain_1.jpg|100x100px|thumb|center]]
|C1
|Thin Film
|
|
*2.5x
*5x
*5x
*10x
*10x
Line 338: Line 112:
*50x
*50x
*100x
*100x
|10x
|
|
*Polarizer
*Episcopic
*Diascopic
*Brightfield
|No
|No
|-
|-
|-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:center;"
!Nikon Eclipse L200 #1[[image:Nikon Eclipse L200.jpg|100x100px|thumb|center]][[image:Nikon Eclipse L200_1.jpg|100x100px|thumb|center]]
|D3
|Thin Film
|
|
*2.5x
*2.5x
Line 361: Line 119:
*50x
*50x
*100x
*100x
|10x
|
|
*Motorized stage
*5x
*'''[[Specific_Process_Knowledge/Characterization/Optical microscope/Nikon Eclipse L200 auto scan guide|Auto scan guide]]'''
*10x
*20x
*50x
*100x
|Zoom 1x - 8x
|
|
*Episcopic
*Diascopic
*Brightfield
*Darkfield
|DS-Fi1
|NIS-BR
|-
|-
|-style="background:LightGrey; color:black; vertical-align:middle; text-align:center;"
!Leitz Medilux[[image:Leitz Medilux.jpg|100x100px|thumb|center]]
|D3
|Thin Film
|
*2.5x
*5x
*5x
*10x
*10x
*20x
*20x
*50x
*50x
|-
|-
|-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:left;"
!Ocular
|10x
|10x
|10x
|10x
|10x
|10x
|10x
|10x
|10x
|10x
|10x
|10x
|-
|-
|-style="background:LightGrey; color:black; vertical-align:middle; text-align:left;"
!Special features
|Stereoscopic microscope
|IR imaging
|
|
|
*Motorized stage
*'''[[Specific_Process_Knowledge/Characterization/Optical microscope/Nikon Eclipse L200 auto scan guide|Auto scan guide]]'''
|
|
|
|
|
|Stereoscopic microscope
|
|
*Episcopic
*Diascopic
*Brightfield
|DX40-274FW
|Kappa Control Center
|-
|-


|-
|-
|-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:center;"
|-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:left;"
!Nikon Eclipse L200N #3[[image:Nikon Eclipse L 200 3_1.jpg|100x100px|thumb|center]]
!Contrast mechanisms
|E4
|
|Lithography
*Brightfield
|
|
*2.5x
*Polarizer
*5x
*Brightfield
*10x
*20x
*50x
*100x
|10x
|
|
*Brightfield
*Darkfield
|
|
*Polarizer
*Polarizer
*Episcopic
*Brightfield
*Diascopic
|
*Brightfield
*Brightfield
*Darkfield
*Darkfield
|
|
*DS-Fi2
*Brightfield
*C-mount, 0.7x relay
*Darkfield
|NIS-D
|-
 
|-
|-style="background:LightGrey; color:black; vertical-align:middle; text-align:center;"
!Nikon Eclipse L200N #4[[image:Nikon Eclipse L 200 4_1.jpg|100x100px|thumb|center]]
|E5
|Lithography
|
|
*2.5x
*Polarizer
*5x
*Brightfield
*10x
*Darkfield
*20x
*50x
*100x
|10x
|
|
*Polarizer
*Brightfield
*Darkfield
|
|
*Polarizer
*Polarizer
*Episcopic
*Diascopic
*Brightfield
*Brightfield
*Darkfield
*Darkfield
|
|
*DS-Fi2
*Brightfield
*C-mount, 0.7x relay
|
|NIS-D
*Brightfield
*Darkfield
|-
|-


|-
|-
|-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:center;"
|-style="background:LightGrey; color:black; vertical-align:middle; text-align:left;"
!Nikon ME 600[[image:Nikon ME 600.jpg|100x100px|thumb|center]][[image:Nikon ME 600_1.jpg|100x100px|thumb|center]]
!Illumination modes
|F1
|Thin Film
|
|
*5x
*Episcopic
*10x
|
*20x
*Episcopic
*50x
*Diascopic
*100x
|
|10x
*Episcopic
*Diascopic
|
*Episcopic
*Diascopic
|
*Episcopic
*Diascopic
|
*Episcopic
*Diascopic
|
|
*Episcopic
*Diascopic
|
|
*Polarizer
*Episcopic
*Episcopic
*Brightfield
*Diascopic
*Darkfield
|DS-Fi2
|NIS-D
|-
 
|-
|-style="background:LightGrey; color:black; vertical-align:middle; text-align:center;"
!Leica S8 APO[[image:Leica S8 APO.jpg|100x100px|thumb|center]]
|F2
|Thin Film
|Zoom 1x - 8x
|10x
|Stereoscopic microscope
|Episcopic
|No
|No
|-
 
|-
|-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:center;"
!Zeiss Axiotron[[image:Zeiss Axiotron.jpg|100x100px|thumb|center]][[image:Zeiss Axiotron_1.jpg|100x100px|thumb|center]]
|F3
|Lithography
|
|
*5x
*Episcopic
*10x
*20x
*50x
|10x
|
|
*Episcopic
|
|
*Episcopic
*Episcopic
*Diascopic
*Diascopic
*Brightfield
*Darkfield
|Infinity X
|DeltaPix
|-
|-


|}
<br clear="all" />
=<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]]=
{|border="1" cellspacing="1" cellpadding="3" style="text-align:left;"
|-
|-
|-style="background:white; color:black; vertical-align:middle; text-align:center;"
|-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:left;"
!Nikon SMZ 1000
!Camera
!Noco IR
|None
!Leica INM 100
|IR camera
!Nikon Eclipse L200 #2
|DS-Fi2
!Zeiss Jenatech
|None
!Nikon Eclipse L200 #1
|DS-Fi1
!Leitz Medilux
|DS-Fi1
!Nikon Eclipse L200N #3
|
!Nikon Eclipse L200N #4
*DS-Fi2
!Nikon ME 600
*C-mount, 0.7x relay
!Leica S8 APO
!Zeiss Axiotron
|-
 
|-
|-style="background:white; color:black; vertical-align:middle; text-align:center;"
|[[image:Nikon SMZ 1000.jpg|100x100px|thumb|center]]
|[[image:Noco IR microscope.jpg|100x100px|thumb|center]][[image:Noco IR microscope_1.jpg|100x100px|thumb|center]]
|[[image:Nikon SMZ 1000.jpg|100x100px|thumb|center]]
|[[image:Nikon Eclipse L200 2.jpg|100x100px|thumb|center]][[image:Nikon Eclipse L200 2_1.jpg|100x100px|thumb|center]]
|[[image:Zeiss Jenatech strain.jpg|100x100px|thumb|center]][[image:Zeiss Jenatech strain_1.jpg|100x100px|thumb|center]]
|[[image:Nikon Eclipse L200.jpg|100x100px|thumb|center]][[image:Nikon Eclipse L200_1.jpg|100x100px|thumb|center]]
|[[image:Leitz Medilux.jpg|100x100px|thumb|center]]
|[[image:Nikon Eclipse L 200 3_1.jpg|100x100px|thumb|center]]
|[[image:Nikon Eclipse L 200 4_1.jpg|100x100px|thumb|center]]
|[[image:Nikon ME 600.jpg|100x100px|thumb|center]][[image:Nikon ME 600_1.jpg|100x100px|thumb|center]]
|[[image:Leica S8 APO.jpg|100x100px|thumb|center]]
|[[image:Zeiss Axiotron.jpg|100x100px|thumb|center]][[image:Zeiss Axiotron_1.jpg|100x100px|thumb|center]]
|-
 
|-
|-style="background:LightGrey; color:black; vertical-align:middle; text-align:center;"
|
|
*DS-Fi2
*C-mount, 0.7x relay
|DS-Fi2
|None
|Infinity X
|-
|-


|-
|-
|-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:center;"
|-style="background:LightGrey; color:black; vertical-align:middle; text-align:left;"
|
!Analysis software
|None
|None
|NIS-D
|None
|NIS-BR
|NIS-D
|NIS-D
|NIS-D
|NIS-D
|None
|DeltaPix
|-
|-


Line 555: Line 280:


<br clear="all" />
<br clear="all" />
There are also two optical microscopes in building 451, a stereo microscope and a transmission microscope, that were both previously located in Packlab. Please ask staff / the BioMic group for details.

Latest revision as of 11:35, 7 November 2023

Feedback to this page: click here

This page is written by DTU Nanolab internal

Nikon SMZ 1000 Noco IR Leica INM 100 Zeiss Jenatech Nikon Eclipse L200 #1 Nikon Eclipse L200 #2 Nikon Eclipse L200N #3 Nikon Eclipse L200N #4 Nikon ME 600 Leica S8 APO Zeiss Axiotron
Location 346-901 346-901 346-901 cleanroom A1 cleanroom D3 cleanroom F3 cleanroom E4 cleanroom E5 cleanroom F1 cleanroom Cx1 cleanroom D3
Responsible group Wet chemistry Wet chemistry Wet chemistry Lithography Lithography Lithography Lithography Lithography Lithography Lithography Lithography
Objectives Zoom 0.8x - 8x
  • 2.5x
  • 10x
  • 20x
  • 50x
  • 2.5x
  • 5x
  • 10x
  • 20x
  • 50x
  • 5x
  • 10x
  • 20x
  • 50x
  • 100x
  • 2.5x
  • 5x
  • 10x
  • 20x
  • 50x
  • 2.5x
  • 5x
  • 10x
  • 20x
  • 50x
  • 100x
  • 2.5x
  • 5x
  • 10x
  • 20x
  • 50x
  • 100x
  • 2.5x
  • 5x
  • 10x
  • 20x
  • 50x
  • 100x
  • 5x
  • 10x
  • 20x
  • 50x
  • 100x
 Zoom 1x - 8x
  • 5x
  • 10x
  • 20x
  • 50x
Ocular 10x 10x 10x 10x 10x 10x 10x 10x 10x 10x 10x
Special features Stereoscopic microscope IR imaging Stereoscopic microscope
Contrast mechanisms
  • Brightfield
  • Polarizer
  • Brightfield
  • Brightfield
  • Darkfield
  • Polarizer
  • Brightfield
  • Brightfield
  • Darkfield
  • Brightfield
  • Darkfield
  • Polarizer
  • Brightfield
  • Darkfield
  • Polarizer
  • Brightfield
  • Darkfield
  • Polarizer
  • Brightfield
  • Darkfield
  • Brightfield
  • Brightfield
  • Darkfield
Illumination modes
  • Episcopic
  • Episcopic
  • Diascopic
  • Episcopic
  • Diascopic
  • Episcopic
  • Diascopic
  • Episcopic
  • Diascopic
  • Episcopic
  • Diascopic
  • Episcopic
  • Diascopic
  • Episcopic
  • Diascopic
  • Episcopic
  • Episcopic
  • Episcopic
  • Diascopic
Camera None IR camera DS-Fi2 None DS-Fi1 DS-Fi1
  • DS-Fi2
  • C-mount, 0.7x relay
  • DS-Fi2
  • C-mount, 0.7x relay
 DS-Fi2 None Infinity X
Analysis software None None NIS-D None NIS-BR NIS-D NIS-D NIS-D NIS-D None DeltaPix


There are also two optical microscopes in building 451, a stereo microscope and a transmission microscope, that were both previously located in Packlab. Please ask staff / the BioMic group for details.

Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Characterization/Optical_microscope&oldid=48209"