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'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/314/Microscopy_314-307/SEM/AFEG click here]'''
''This section is written by DTU Nanolab internal if nothing else is stated.''
[[Category:314]]
[[Category:314-Microscopy]]
__FORCETOC__
=AFEG 250 Analytical ESEM (FEI Quanta FEG 250) =
=AFEG 250 Analytical ESEM (FEI Quanta FEG 250) =


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*'''Electron source'''
*'''Electron source'''
Field emission gun
**Field emission gun
*'''Accelerating voltage'''
*'''Accelerating voltage'''
500 V- 30 kV
**500 V- 30 kV
*'''Resolution'''
*'''Resolution'''
2 nm at 30 kV (SE)
**2 nm at 30 kV (SE)
*'''Imaging detectors'''
*'''Imaging detectors'''
Everhart-Thornley (SE/BSE), Solid State BSE, Large Field, Gaseous SE, Gaseous BSE, Gaseous Analytical, STEM, vCD and CCD Camera
**Everhart-Thornley (SE/BSE)
**Solid State BSE
**Large Field (LVD)
**Gaseous SE (GSED)
**Gaseous BSE
**Gaseous Analytical (GAD)
**STEM
**vCD
*'''Imaging modes'''
*'''Imaging modes'''
High and low vacuum
High and low vacuum
*'''Analytical capabilities'''
*'''Analytical capabilities'''
Energy dispersive X-rays (Oxford Instruments 50 mm2 X-Max silicon drift detector, MnKα resolution at 124 eV)
**Energy dispersive X-rays (Oxford Instruments 50 mm2 X-Max silicon drift detector, MnKα resolution at 124 eV)
Wavelength Dispersive Spectrosopy
**Wavelength Dispersive Spectrosopy


==Equipment performance and process related parameters==
==Equipment performance and process related parameters==
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* High vacuum (10<sup>-4</sup> Pa), Low vacuum (10 to 200Pa)
* High vacuum (10<sup>-4</sup> Pa), Low vacuum (10 to 200Pa)
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!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Samples
|style="background:LightGrey; color:black"|Sample sizes
|style="background:LightGrey; color:black"|Sample sizes
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'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/314/SEM/AFEG click here]'''

Latest revision as of 09:11, 27 June 2023

Feedback to this page: click here

This section is written by DTU Nanolab internal if nothing else is stated.

AFEG 250 Analytical ESEM (FEI Quanta FEG 250)

DTU Nanolab AFEG positioned in B314 R034

The AFEG is an FEI Quanta FEG 250(Field Emission Gun) scanning electron microscope with a spatial resolution of 2 nm for the ETD detector in high vacuum at 30 keV. The microscope can operate in high vacuum and low vacuum modes at room temperature. Our AFEG is fitted with EDS and WDS detectors, which allows for analytical measurements in all the operation modes.

Process information

  • Electron source
    • Field emission gun
  • Accelerating voltage
    • 500 V- 30 kV
  • Resolution
    • 2 nm at 30 kV (SE)
  • Imaging detectors
    • Everhart-Thornley (SE/BSE)
    • Solid State BSE
    • Large Field (LVD)
    • Gaseous SE (GSED)
    • Gaseous BSE
    • Gaseous Analytical (GAD)
    • STEM
    • vCD
  • Imaging modes

High and low vacuum

  • Analytical capabilities
    • Energy dispersive X-rays (Oxford Instruments 50 mm2 X-Max silicon drift detector, MnKα resolution at 124 eV)
    • Wavelength Dispersive Spectrosopy

Equipment performance and process related parameters

Equipment AFEG FEI Quanta FEG 250
Purpose Vizualization and Microanalysis
  • Vizualization of surfaces (topography and Z contrast)
  • Vizualization of projected image (BF STEM image)
  • Energy Dispersive X-ray analysis (EDS)
  • Wavelength Dispersive Spectrosopy (WDS)
Performance Resolution The resolution of AFEG depends on the sample and the operation mode!
  • 2 nm at 30 keV for Au on C sample with the ETD detector
Instrument specifics Detectors
  • ETD- Everhart-Thornley for secondary electrons
  • BSD- Solid state Back Scattered Detector
  • LFD- Large Field Detector for secondary electrons
  • GSED- Gaseous Secondary Electron Detector
  • GBSD- Gaseous Backscattered Electron Detector
  • GAD- Gaseous Analystical Detector
  • STEM- right field Scanning Tramission Electron detector
  • vCD- low voltage BSED
  • CCD camera
Electron source
  • Field Emission - Tungsten filament
Stage (room temperature)
  • X, Y: 25 × 25 mm
  • T: 0 to 60o
  • R: 360o
WDS
  • Oxford Instruments WDS
EDS
  • Oxford Instruments 50 mm2 X-Max silicon drift detector, MnKα resolution at 124 eV
Operating pressures
  • High vacuum (10-4 Pa), Low vacuum (10 to 200Pa)
Samples Sample sizes
  • No actual limit (limitted by stage movment and detector position).
Allowed materials
  • Conductors, Semiconductors,Insulators, Prepared Biological ((not pathogents!)
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