Specific Process Knowledge/Thermal Process/BCB Curing Oven: Difference between revisions
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[[Category: Equipment |Thermal BCB]] | [[Category: Equipment |Thermal BCB]] | ||
[[Category: Thermal process|BCB]] | [[Category: Thermal process|BCB]] | ||
== BCB Curing Oven == | == BCB Curing Oven == | ||
[[image:BCB oven.jpeg|350x350px|right|thumb|The BCB Curing Oven. Positioned in | [[image:BCB oven.jpeg|350x350px|right|thumb|The BCB Curing Oven. Positioned in room Cx1/ Photo: DTU Nanolab internal]] | ||
The BCB Curing Oven is mainly used for curing of BCB (bisbenzocyclobutene) and for alloying of some metals in a nitrogen atmosphere. | The BCB Curing Oven is mainly used for curing of BCB (bisbenzocyclobutene, cyclotene®) and for alloying of some metals in a nitrogen atmosphere. | ||
During processing the oven is rapidly heated by use of eight halogen lamps situated below the sample. The maximum allowed temperature is 450 <sup>o</sup>C. | During processing the oven is rapidly heated by use of eight halogen lamps situated below the sample. The maximum allowed temperature is 450 <sup>o</sup>C. | ||
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*Quartz | *Quartz | ||
*Resist (prebaked) | *Resist (prebaked) | ||
*Metals | *Metals on Material list 1, 2 and 3 (see the cross contamination information in LabManager) | ||
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