Specific Process Knowledge/Etch/Wet Titanium Etch: Difference between revisions
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'''Feedback to this page''': '''[mailto:wetchemistry@ | '''Feedback to this page''': '''[mailto:wetchemistry@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/Wet_Titanium_Etch click here]''' | ||
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[[Category: Equipment|Etch Wet Titanium]] | [[Category: Equipment|Etch Wet Titanium]] | ||
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Not known (it bubbles while etching) | Not known (it bubbles while etching) | ||
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50 nm etches in around 2 min | |||
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