Specific Process Knowledge/Etch/Wet Titanium Etch: Difference between revisions
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'''Feedback to this page''': '''[mailto:wetchemistry@ | '''Feedback to this page''': '''[mailto:wetchemistry@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/Wet_Titanium_Etch click here]''' | ||
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[[Category: Equipment|Etch Wet Titanium]] | [[Category: Equipment|Etch Wet Titanium]] | ||
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|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
|'''Chemical solution''' | |'''Chemical solution''' | ||
|HF:NH<sub>4</sub>F | |HF : NH<sub>4</sub>F : NH<sub>4</sub>HF<sub>2</sub> | ||
|H<sub>2</sub>O : NH<sub>4</sub>OH : H<sub>2</sub>O<sub>2</sub> - 5:1:1 | |||
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Not known (it bubbles while etching) | Not known (it bubbles while etching) | ||
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50 nm etches in around 2 min | |||
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