Specific Process Knowledge/Etch/DRIE-Pegasus/Notation: Difference between revisions
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== How to read the | <!-- Page reviewed 9/8-2022 jmli --> | ||
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{{contentbydryetch}} | |||
== How to read the notation on process recipes == | |||
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Look at two examples from the etch cycle of Step1 of the Process A shown in '''bold''' below: | |||
# The Platen power has the setting ''120 >> 140 (1.5s) 45 '' - it is to be interpreted as: | # The Platen power has the setting ''120 >> 140 (1.5s) 45 '' - it is to be interpreted as: | ||
## In the first 1.5 seconds of the every cycle the platen power has a value that is ramped (indicated by >>) from 120 W initially to 150 W in the end | ## In the first 1.5 seconds of the every cycle the platen power has a value that is ramped (indicated by >>) from 120 W initially to 150 W in the end | ||
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| Common | | Common | ||
| colspan="4" | Temperature 20 degs, HBC 10 torr | | colspan="4" | Temperature 20 degs, HBC 10 torr | ||
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