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'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/Courses/TPT_Dry_Etch click here]'''
==The Dry Etch TPT  ==
==The Dry Etch TPT  ==


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!colspan="2"|Dry Etch Tool Package Training
!colspan="2"|Dry Etch Tool Package Training
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!Signing up for the course - Course material
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The course is in DTU Learn. You sign up for the course by enroling yourself in the course "DTU Nanolab TPT: Dry Etch".
*Log into DTU Learn here: [https://learn.inside.dtu.dk DTU Learn]
*Select the menu "Discover"
*Search for "Nanolab"
Select the course "DTU Nanolab TPT:Dry Etch"
*Press "Enroll in Course"
*You have now signed up for the course.
*Go to the course page in DTU Learn and choose "Course Content" and "Content"
*You have to read it all and go through all the material in the Dry Etch TPT.
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!Schedule
!Schedule
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'''Theoretical part'''
'''Theoretical part'''
* A 3-hour lecture. The lecture is on videos. the videos can be found on YouTube, see link below. You can also find the slides with notes below. It can be helpful to print out the lecture slide for your notes and questions while watching the videos. After seeing the videos you must attend a Question&Evaluation session (1-1½ hour), max. 3 persons per session, Please sign up via: [https://doodle.com/poll/awkny9e952arxbxm Dry Etch TPT Lecture doodle]. The Question&Evaluation session takes place in room: 347-078
* A 3-hour lecture. The lecture is on videos. the videos can be found on YouTube, see link below. You can also find the slides with notes below. It can be helpful to print out the lecture slide for your notes and questions while watching the videos. After seeing the videos you need to go though a quiz (assignment). You will get a link to the quiz when signing up for the Question&Evaluation session (1-1½ hour), max. 3 persons per session, Please sign up via: [https://doodle.com/poll/awkny9e952arxbxm Dry Etch TPT Lecture doodle]. The Question&Evaluation session takes place in room: 347-078 normally. At the moment we can do the Question&Evaluation session online.


'''Practical part'''
'''Practical part'''
* A 2 hour training session, max. 3 persons per session will be planed after the Question&Evaluation session.
* A 2 hour training session, max. 3 persons per session will be planed after the Question&Evaluation session. Before this you need to watch the "Pre hands-on training videos"
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!Location
!Location
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'''Theoretical part  (the question&evaluation session)'''
'''Theoretical part  (the question&evaluation session)'''
* Room: 347-R078
* Room: 347-R078 (or Zoom)
'''Practical part'''
'''Practical part'''
* The training session takes place inside the cleanroom. The meeting point will be in The gowning area.
* The training session takes place inside the cleanroom. The meeting point will be in The gowning area.
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'''Before the Question&Evaluation session'''
'''Before the Question&Evaluation session'''
*Watch the lecture videos, see link to the videos below.
*Watch the lecture videos, see link to the videos below. And go though the quiz (assignment).
*If you are not familiar with dry etching we advice you to read through the "Lecture slides with explanatory text included" [[:File:TPT Dry etching April2018 with notes.pdf]] before watching the videos.
*If you are not familiar with dry etching we advice you to read through the "Lecture slides with explanatory text included" [[:File:TPT Dry etching April2018 with notes.pdf]] before or after watching the videos and during answering the quiz.


'''Before training session'''
'''Before training session'''
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*Berit Herstrøm
*Berit Herstrøm


If you have questions you can contact us by e-mailing [mailto:dryetch@danchip.dtu.dk dryetch@danchip.dtu.dk].  
If you have questions you can contact us by e-mailing [mailto:dryetch@nanolab.dtu.dk dryetch@nanolab.dtu.dk].  
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!Learning Objectives
!Learning Objectives
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<br clear="all" />
<br clear="all" />


===Material for preparations and further information===
===Material for preparations and further information (You will also find this in the course material inside DTU Learn)===
{| style="color: black;" width="90%"  
{| style="color: black;" width="90%"  
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'''<big>Slides from Lecture</big>'''
'''<big>Slides from Lecture</big>'''


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*Lecture powerpoint slide show [[:File:TPT Dry etching April2018.pptx]]
*Lecture powerpoint slide show [[:File:TPT Dry etching April2018.pptx]]
*Lecture slides with explanatory text included [[:File:TPT Dry etching April2018 with notes.pdf]]
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*Lecture slides with explanatory text included [https://labmanager.dtu.dk/view_binary.php?class=MiscDocument&id=7&name=Lecture+Power+point+with+notes+dec+2020.pdf], ''requires login''


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Latest revision as of 12:32, 24 March 2023

Feedback to this page: click here

The Dry Etch TPT

DTU Nanolab offers a Tool Package Training in dry etching; the course includes theory on dry etching and equipment, as well as training in equipment operation in the cleanroom.

The course is for all users who intend to perform any kind of plasma dry etching in the cleanroom, and is a prerequisite for training in any of the plasma dry etch equipment's.


Dry Etch Tool Package Training
Signing up for the course - Course material

The course is in DTU Learn. You sign up for the course by enroling yourself in the course "DTU Nanolab TPT: Dry Etch".

  • Log into DTU Learn here: DTU Learn
  • Select the menu "Discover"
  • Search for "Nanolab"

Select the course "DTU Nanolab TPT:Dry Etch"

  • Press "Enroll in Course"
  • You have now signed up for the course.
  • Go to the course page in DTU Learn and choose "Course Content" and "Content"
  • You have to read it all and go through all the material in the Dry Etch TPT.
Learning Objectives
  • Know why and when to use dry etching
  • Use the dry etchers without harming the machines
  • Select the right instrument to use for his/her dry etch processing
  • Select an appropriate etch recipe for his/her dry etch processing
  • Spot when the recipe needs to be tuned for his/her needs and
  • Suggest relevant tuning parameters


Material for preparations and further information (You will also find this in the course material inside DTU Learn)

Literature

  • No extra Literature at the moment

Slides from Lecture

  • Lecture slides with explanatory text included [1], requires login

Lecture videos
(Watch before the question and evaluation session)

Pre hands-on training videos
(Watch before the hands-on training)


Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=LabAdviser/Courses/TPT_Dry_Etch&oldid=45380"