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= Isotropic etching in silicon on the ICP Metal Etch =
= Isotropic etching in silicon on the ICP Metal Etch =
<!--Checked for updates on 11/2-2019 - ok/jmli -->
<!--Checked for updates on 11/2-2019 - ok/jmli -->
 
<!--Checked for updates on 24/8-2021. ok/ jmli-->
<!--Checked for updates on 4/4-2025 - ok/jmli -->


{| border="1" cellpadding="0" cellspacing="0" style="text-align:center;"
{| border="1" cellpadding="0" cellspacing="0" style="text-align:center;"
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| 3          <!--Platen power  -->
| 3          <!--Platen power  -->
| [[Specific Process Knowledge/Etch/ICP Metal Etcher/silicon/isotropic/isoslow1|'''Click HERE!''' ]]      <!-- link processes -->
| [[Specific Process Knowledge/Etch/ICP Metal Etcher/silicon/isotropic/isoslow1|'''Click HERE!''' ]]      <!-- link processes -->
| NA           <!--Keywords  -->
| Note: Lior Shiv got very high etch rate for this recipe >1.5µm/min 2019-07-12           <!--Keywords  -->
|-
|-
|-
|-
! no name, tested by Lior Shiv@Capres 2019-017-12    <!--Recipe Name  -->
! no name, tested by Lior Shiv@Capres 2019-07-12    <!--Recipe Name  -->
| A          <!--Step  -->
| A          <!--Step  -->
| 20            <!--Temperature  -->
| 20            <!--Temperature  -->
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