Specific Process Knowledge/Etch/ICP Metal Etcher/silicon/isotropic: Difference between revisions
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= Isotropic etching in silicon on the ICP Metal Etch = | = Isotropic etching in silicon on the ICP Metal Etch = | ||
<!--Checked for updates on 11/2-2019 - ok/jmli --> | <!--Checked for updates on 11/2-2019 - ok/jmli --> | ||
<!--Checked for updates on 24/8-2021. ok/ jmli--> | |||
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| 3 <!--Platen power --> | | 3 <!--Platen power --> | ||
| [[Specific Process Knowledge/Etch/ICP Metal Etcher/silicon/isotropic/isoslow1|'''Click HERE!''' ]] <!-- link processes --> | | [[Specific Process Knowledge/Etch/ICP Metal Etcher/silicon/isotropic/isoslow1|'''Click HERE!''' ]] <!-- link processes --> | ||
| | | Note: Lior Shiv got very high etch rate for this recipe >1.5µm/min 2019-07-12 <!--Keywords --> | ||
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! no name, tested by Lior Shiv@Capres 2019-07-12 <!--Recipe Name --> | |||
| A <!--Step --> | |||
| 20 <!--Temperature --> | |||
| - <!--Process time (needed if ramping is enabled) --> | |||
| 10 <!--Pressure --> | |||
| - <!--Process chamber setup --> | |||
| 90 <!--SF6 flow --> | |||
| 0 <!--O2 flow --> | |||
| 0 <!--C4F8 flow --> | |||
| 0 <!--Ar flow --> | |||
| 0 <!--CF4 flow --> | |||
| 0 <!--H2 flow --> | |||
| 0 <!--CH4 flow --> | |||
| 0 <!--BCl3 flow --> | |||
| 0 <!--Cl2 flow --> | |||
| 0 <!--HBr flow --> | |||
| 150 <!--Coil power --> | |||
| 3 <!--Platen power --> | |||
| <!-- link processes --> | |||
| About 10% load, etch rate around 400nm/min <!--Keywords --> | |||
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Latest revision as of 15:20, 24 August 2021
Isotropic etching in silicon on the ICP Metal Etch
| Recipe | Step | Temp. | Time | Pres. | Hardware | Gasses | RF powers | Observations | |||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| SF6 | O2 | C4F8 | Ar | CF4 | H2 | CH4 | BCl3 | Cl2 | HBr | Coil | Platen | SEM images of different runs | Keywords | ||||||
| isoslow1 | A | 20 | - | 10 | - | 90 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 400 | 3 | Click HERE! | Note: Lior Shiv got very high etch rate for this recipe >1.5µm/min 2019-07-12 |
| no name, tested by Lior Shiv@Capres 2019-07-12 | A | 20 | - | 10 | - | 90 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 150 | 3 | About 10% load, etch rate around 400nm/min | |