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'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/Etching_of_Polymer/Polymer_Etch_by_ASE click here]'''
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= Etching of polymers on the ASE =
= Etching of polymers on the ASE =
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! colspan="2" align="center"| Materials
! colspan="2" align="center"| Materials
! colspan="8" align="center"| Process parameters  
! colspan="8" align="center"| Process parameters  
! rowspan="2" align="center" width="300" | Comments by Kevin Riddell SPTS prior to any tests at Danchip
! rowspan="2" align="center" width="300" | Comments by Kevin Riddell SPTS prior to any tests at Nanolab
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