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Specific Process Knowledge/Etch/DRIE-Pegasus/DUVetch: Difference between revisions

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'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/DUVetch click here]'''
'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/DUVetch click here]'''
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== Etch processes designed for stepper resists ==  
== Etch processes designed for stepper resists ==  
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| rowspan="2" | [[Specific Process Knowledge/Etch/DRIE-Pegasus/Parameters#Hardware | HW]]  
| rowspan="2" | [[Specific Process Knowledge/Etch/DRIE-Pegasus/Parameters#Hardware | HW]]  
! width="40" rowspan="2" | Runs
! width="40" rowspan="2" | Runs
! width="300" | Key words
! width="300" rowspan="2" | Key words
|-
|-
| degs
| degs
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