Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1: Difference between revisions
No edit summary |
|||
| (4 intermediate revisions by the same user not shown) | |||
| Line 1: | Line 1: | ||
<!--Checked for updates on 24/8-2021. ok/ jmli--> | |||
<!--Checked for updates on 21/10-2025. ok/ jmli--> | |||
= XPS analysis of ALD deposited layers = | = XPS analysis of ALD deposited layers = | ||
| Line 30: | Line 33: | ||
### Ti2p Scan | ### Ti2p Scan | ||
### O1s Scan | ### O1s Scan | ||
The three points are distributed in such a way on the sample holder plate as to minimise the redeposition of one depth profile onto another. They serve different purposes: | |||
* The second point labelled 'Scanned' is the slow and time consuming analysis using scanned spectra and includes survey spectra. It will take roughly 7.5 hours to do 35 levels. | |||
* The first point labelled 'snapshot' only records the fast snapshots (no survey) and therefore only takes about 30 minutes. The question is if one can obtain the same information as the scanned version. | |||
* The last point labelled 'Extended +20eV end, 0.2 eV step' is intended to be used for Quases analysis. | |||
== Guidelines on data processing == | == Guidelines on data processing == | ||
| Line 44: | Line 52: | ||
==== [[Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1/1Open|1. Open the experiment and prepare processing grids]] ==== | ==== [[Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1/1Open|1. Open the experiment and prepare processing grids]] ==== | ||
==== [[Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1/2Survey|2. Survey spectra | ==== [[Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1/2Survey|2. Survey spectra processing]] ==== | ||
==== [[Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1/3scanned|3. High resolution scan processing]]==== | |||