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== The T-ridge field ==
== The T-ridge field ==
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Latest revision as of 11:07, 28 June 2023
Feedback to this page:
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Unless otherwise stated, the content of this page was created by the dry etch group at DTU Nanolab
The T-ridge field
The T-ridge fields contain a triple ridge structure for a number of different ridge widths. The triple ridge structure is shown in the image.
Definition of the measures used in the table below It consists of three ridges of a certain width. The two trenches between them have the same width. The three ridges are separated by an etched area that is five times the ridge width. This parameters of this feature is not changed in the different Travka masks. In order to vary the exposed area on each Travka mask a masked area (in the figure called 'space') is added between every feature.
Travka 05 T-ridge field
Travka 05: T-ridge 2 µm to 6 µm features
Width (µm)
Triple width (µm)
Area (µm)
Space (µm)
Total feature width (µm)
Number of features
Total width (µm)
2
10
10
450
480
2
960
3
15
15
675
720
1
1680
4
20
20
900
960
1
2640
5
25
25
1125
1200
1
3840
6
30
30
1350
1440
1
5280
Travka 05: T-ridge 8 µm to 20 µm features
Width (µm)
Triple width (µm)
Area (µm)
Space (µm)
Total feature width (µm)
Number of features
Total width (µm)
8
40
40
1800
1920
1
7200
10
50
50
2250
2400
1
9600
15
75
75
3375
3600
1
13200
20
100
100
4500
4800
1
18000
Travka 10 T-ridge field
Travka 10: T-ridge 2 µm to 6 µm features
Width (µm)
Triple width (µm)
Area (µm)
Space (µm)
Total feature width (µm)
Number of features
Total width (µm)
2
10
10
210,0
240
3
720
3
15
15
315,0
360
3
1800
4
20
20
420,0
480
3
3240
5
25
25
525,0
600
3
5040
6
30
30
630,0
720
3
7200
Travka 10: T-ridge 8 µm to 20 µm features
Width (µm)
Triple width (µm)
Area (µm)
Space (µm)
Total feature width (µm)
Number of features
Total width (µm)
8
40
40
840,0
960
2
9120
10
50
50
1050,0
1200
2
11520
15
75
75
1575,0
1800
2
15120
20
100
100
2100,0
2400
2
19920
Travka 20 T-ridge field
Travka 20: T-ridge 2 µm to 6 µm features
Width (µm)
Triple width (µm)
Area (µm)
Space (µm)
Total feature width (µm)
Number of features
Total width (µm)
2
10
10
90,0
120
5
600
3
15
15
135,0
180
6
1680
4
20
20
180,0
240
5
2880
5
25
25
225,0
300
5
4380
6
30
30
270,0
360
5
6180
Travka 20: T-ridge 8 µm to 20 µm features
Width (µm)
Triple width (µm)
Area (µm)
Space (µm)
Total feature width (µm)
Number of features
Total width (µm)
8
40
40
360,0
480
5
8580
10
50
50
450,0
600
5
11580
15
75
75
675,0
900
4
15180
20
100
100
900,0
1200
4
19980
Travka 35 T-ridge field
Travka 35: T-ridge 2 µm to 6 µm features
Width (µm)
Triple width (µm)
Area (µm)
Space (µm)
Total feature width (µm)
Number of features
Total width (µm)
2
10
10
38,6
68,5
7
480
3
15
15
57,9
102,9
7
1200
4
20
20
77,1
137,1
9
2434
5
25
25
96,4
171,4
8
3805
6
30
30
115,7
205,7
8
5451
Travka 35: T-ridge 8 µm to 20 µm features
Width (µm)
Triple width (µm)
Area (µm)
Space (µm)
Total feature width (µm)
Number of features
Total width (µm)
8
40
40
154,3
274,3
8
7646
10
50
50
192,9
342,9
8
10389
15
75
75
289,3
514,3
8
14503
20
100
100
385,7
685,7
8
19989
Travka 50 T-ridge field
Travka 50: T-ridge 2 µm to 6 µm features
Width (µm)
Triple width (µm)
Area (µm)
Space (µm)
Total feature width (µm)
Number of features
Total width (µm)
2
10
10
18,0
48
13
624
3
15
15
27,0
72
12
1488
4
20
20
36,0
96
12
2640
5
25
25
45,0
120
12
4080
6
30
30
54,0
144
12
5808
Travka 50: T-ridge 8 µm to 20 µm features
Width (µm)
Triple width (µm)
Area (µm)
Space (µm)
Total feature width (µm)
Number of features
Total width (µm)
8
40
40
72,0
192
12
8112
10
50
50
90,0
240
11
10752
15
75
75
135,0
360
11
14712
20
100
100
180,0
480
11
19992
Travka 65 T-ridge field
Travka 65: T-ridge 2 µm to 6 µm features
Width (µm)
Triple width (µm)
Area (µm)
Space (µm)
Total feature width (µm)
Number of features
Total width (µm)
2
10
10
6,9
36,9
16
590,8
3
15
15
10,4
55,4
17
1532,3
4
20
20
13,8
73,8
15
2640
5
25
25
17,3
92,3
15
4024,6
6
30
30
20,8
110,8
15
5686,2
Travka 65: T-ridge 8 µm to 20 µm features
Width (µm)
Triple width (µm)
Area (µm)
Space (µm)
Total feature width (µm)
Number of features
Total width (µm)
8
40
40
27,7
147,7
15
7901,5
10
50
50
34,6
184,6
15
10670,8
15
75
75
51,9
276,9
15
14824,6
20
100
100
69,2
369,2
14
19993,8
Travka 80 T-ridge field
Travka 80: T-ridge 2 µm to 6 µm features
Width (µm)
Triple width (µm)
Area (µm)
Space (µm)
Total feature width (µm)
Number of features
Total width (µm)
2
10
10
0
30
18
540
3
15
15
0
45
20
1440
4
20
20
0
60
18
2520
5
25
25
0
75
18
3870
6
30
30
0
90
18
5490
Travka 80: T-ridge 8 µm to 20 µm features
Width (µm)
Triple width (µm)
Area (µm)
Space (µm)
Total feature width (µm)
Number of features
Total width (µm)
8
40
40
0
120
18
7650
10
50
50
0
150
18
10350
15
75
75
0
225
18
14400
20
100
100
0
300
18
19800
