Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ: Difference between revisions
No edit summary |
|||
| (4 intermediate revisions by one other user not shown) | |||
| Line 1: | Line 1: | ||
'''Feedback to this page''': '''[mailto:labadviser@ | '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/FAQ click here]''' | ||
<!--Checked for updates on 2/2-2016 - ok/jmli --> | <!--Checked for updates on 2/2-2016 - ok/jmli --> | ||
<!-- Page reviewed 9/8-2022 jmli --> | |||
== Some questions and answers == | == Some questions and answers == | ||
| Line 10: | Line 15: | ||
*[[Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ/Matching|Problems with matching]] | *[[Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ/Matching|Problems with matching]] | ||
*[[Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ/Nanoetch|Nanoetching]] | *[[Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ/Nanoetch|Nanoetching]] | ||
*[[Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ/Potasi|Positively tapered sidewalls]] | *[[Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ/Potasi|Positively tapered sidewalls]] | ||