Specific Process Knowledge/Lithography/EBeamLithographyManual: Difference between revisions
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To request for an e-beam training session, contact e-beam@ | To request for an e-beam training session, contact e-beam@nanolab.dtu.dk; a DTU Nanolab personnel will hereafter provide a time slot. For safety reasons, even fully trained users are only authorized to mount substrates into the e-beam cassettes but not authorized to load the cassettes into the autoloader. | ||
To use the e-beam writer, book the machine via LabManager, and ask help from DTU | To use the e-beam writer, book the machine via LabManager, and ask help from DTU Nanolab staff to load your cassette into the robot loader (autoloader). | ||
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After your exposure, fully trained users can unload their cassettes from the autoloader, unmount their substrates and leave the cassette on the designated table. | After your exposure, fully trained users can unload their cassettes from the autoloader, unmount their substrates and leave the cassette on the designated table. | ||
If you are prohibited to unmount your substrates before another user requires the cassette, you must accept that either the next user or DTU | If you are prohibited to unmount your substrates before another user requires the cassette, you must accept that either the next user or DTU Nanolab personel unmount your substrates. | ||
When un-mounting someone's sample, please place them in a single carrier box, with your initials in parentheses, and write - out of E-beam - date - cassette and slot. | When un-mounting someone's sample, please place them in a single carrier box, with your initials in parentheses, and write - out of E-beam - date - cassette and slot. | ||