Specific Process Knowledge/Characterization/Hardness measurement: Difference between revisions

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==Hardness tester==
==Hardness tester==
[[Image:InnovaHardness.jpg|thumb|300x300px|Hardness tester. Positioned in cleanroom F-2]]
[[Image:InnovaHardness.jpg|thumb|300x300px|Hardness tester. Positioned in cleanroom F-2]]


The purpose is to measure hardness of samples or films. This is done by pressing an indenter (a small pyramid-shaped diamond tip) into sample using a known indentation force. This leaves an indent in the sample. The hardness of the sample can then be derived from the dimensions of the indentation (the softer the material the larger the indentation). The samples should have a reasonably low roughness. Otherwise it can be quite difficult to determine the roughness reliably.
The purpose is to measure hardness of samples or films. This is done by pressing an indenter (a small pyramid-shaped diamond tip) into a sample using a known indentation force. This leaves an indent in the sample. The hardness of the sample can then be derived from the dimensions of the indentation (the softer the material the larger the indentation). The samples should have a reasonably low roughness. Otherwise it can be quite difficult to determine the hardness reliably. Also, the samples must be planar and without large protruding features.




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There is no scheduled calibration of this machine. We do however have three calibration samples which can be used to verify proper operation of the machine. The calibration samples are also good for practicing the measurement procedure. The calibration samples are available in the following three hardnesses: 2xx HV, 4xx HV and 6xx HV.
There is no scheduled calibration of this machine. We do however have three calibration samples which can be used to verify proper operation of the machine. The calibration samples are also good for practicing the measurement procedure. Calibration samples are available in the following three hardnesses: 277 HV, 464 HV and 704 HV. They have been calibrated externally at 1 kgf indentation force and 10 sec indentation time.
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Substrate materials allowed
Substrate materials allowed
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*No restrictions (besides sample must be dry and free from chemical residues)
*No restrictions (besides sample must be non-toxic, dry and free from chemical residues)
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Calibration samples available
Calibration samples available
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*2xx HV
*277 HV 1
*4xx HV
*464 HV 1
*6xx HV
*704 HV 1
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Latest revision as of 12:50, 6 February 2023

Feedback to this page: click here

This page is written by DTU Nanolab internal

Hardness tester

Hardness tester. Positioned in cleanroom F-2

The purpose is to measure hardness of samples or films. This is done by pressing an indenter (a small pyramid-shaped diamond tip) into a sample using a known indentation force. This leaves an indent in the sample. The hardness of the sample can then be derived from the dimensions of the indentation (the softer the material the larger the indentation). The samples should have a reasonably low roughness. Otherwise it can be quite difficult to determine the hardness reliably. Also, the samples must be planar and without large protruding features.


The user manual, technical information and contact information can be found in LabManager:

Equipment info for: Hardness tester

Quality Control - Recipe Parameters and Limits

Quality Control (QC) for the hardness tester

There is no scheduled calibration of this machine. We do however have three calibration samples which can be used to verify proper operation of the machine. The calibration samples are also good for practicing the measurement procedure. Calibration samples are available in the following three hardnesses: 277 HV, 464 HV and 704 HV. They have been calibrated externally at 1 kgf indentation force and 10 sec indentation time.

Equipment performance and process related parameters

Purpose

Hardness tester

  • Sample hardness (Vickers)
  • Film hardness (Vickers)

Performance

Available test forces

  • 0,098 N (0,01 kgf)
  • 0,24 N (0,025 kgf)
  • 0,49 N (0,05 kgf)
  • 0,98 N (0,1 kgf)
  • 1,96 N (0,2 kgf)
  • 2,94 N (0,3 kgf)
  • 4,9 N (0,5 kgf)
  • 9,8 N (1 kgf)
  • 19,6 N (2 kgf)

Data output

  • Machine can calculate hardness in HV (Hardness Vickers) and show result on display
  • The integrated printer has been disabled (not cleanroom compatible)

Substrates

Batch size

  • One sample

Substrate materials allowed

  • No restrictions (besides sample must be non-toxic, dry and free from chemical residues)

Calibration samples available

  • 277 HV 1
  • 464 HV 1
  • 704 HV 1
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