Specific Process Knowledge/Etch/Etching of Gold: Difference between revisions
Appearance
No edit summary |
|||
| (2 intermediate revisions by 2 users not shown) | |||
| Line 1: | Line 1: | ||
'''Feedback to this page''': '''[mailto:labadviser@ | '''Unless anything else is stated, everything on this page, text and pictures are made by DTU Nanolab.''' | ||
'''All links to Kemibrug (SDS) and Labmanager Including APV and QC requires login.''' | |||
'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/Etching_of_Gold click here]''' | |||
==Etching of Gold== | ==Etching of Gold== | ||
Etching of Gold can be done either by wet etch or by sputtering with ions. | Etching of Gold can be done either by wet etch, or by sputtering with ions. | ||
*[[Specific Process Knowledge/Etch/Wet Gold Etch|Etching of Gold by wet etch]] | *[[Specific Process Knowledge/Etch/Wet Gold Etch|Etching of Gold by wet etch]] | ||
*[[Specific_Process_Knowledge/Etch/IBE⁄IBSD Ionfab 300/IBE Au etch|Sputtering of Au]] | *[[Specific_Process_Knowledge/Etch/IBE⁄IBSD Ionfab 300/IBE Au etch|Sputtering of Au]] | ||