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Created page with "* ''This work was done by Henri Jansen and Bingdong Chang in 2017;'' * ''This page was last edited by Bingdong Chang 24 October 2017.'' By combining anisotropic Bosch proc..."
 
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'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/Etch_3_dimensional_silicon_microstructures click here]'''
* ''This work was done by Henri Jansen and Bingdong Chang in 2017;''
* ''This work was done by Henri Jansen and Bingdong Chang in 2017;''


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