Specific Process Knowledge/Etch/DRIE-Pegasus/nanobosch/nanobosch6: Difference between revisions
No edit summary |
|||
| (2 intermediate revisions by the same user not shown) | |||
| Line 1: | Line 1: | ||
<!--Checked for updates on 10/7-2019 - ok/jmli --> | |||
<!-- Ok, jmli 20170627 --> | <!-- Ok, jmli 20170627 --> | ||
<!-- Ok, jmli 20170627 --> | |||
<!--Checked for updates on 24/8-2021. ok/ jmli--> | |||
== Test run using AZ resist 24/9-2012 == | == Test run using AZ resist 24/9-2012 == | ||
<!-- revised 1/6-2015 by jmli --> | <!-- revised 1/6-2015 by jmli --> | ||
Latest revision as of 15:18, 24 August 2021
Test run using AZ resist 24/9-2012
| Substrate information | Wafer | C01296.05 |
|---|---|---|
| Mask | Travka50 mask in a few microns of AZ resist | |
| Date | 24/9-2012 | |
| Tool | Pegasus | |
| Process | Recipe | nanobosch6 |
| Tool conditioning | 3 minute TDESC clean | |
| Process duration | 15 minutes | |
| Purpose | test | |
| Characterisation | SEM Zeiss |
- SEM images
-
-
-
Test run using AZ resist 24/9-2012
| Substrate information | Wafer | C01296.09 |
|---|---|---|
| Mask | Travka80 mask in a few microns of AZ resist | |
| Date | 24/9-2012 | |
| Tool | Pegasus | |
| Process | Recipe | nanobosch6 |
| Tool conditioning | 3 minute TDESC clean | |
| Process duration | 15 minutes | |
| Purpose | test | |
| Characterisation | SEM Zeiss |
- SEM images
-
-
-
