Specific Process Knowledge/Thermal Process/Resist Pyrolysis Furnace: Difference between revisions
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'''Feedback to this page''': '''[mailto:thinfilm@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thermal_Process/Resist_Pyrolysis_Furnace click here]''' | '''Feedback to this page''': '''[mailto:thinfilm@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thermal_Process/Resist_Pyrolysis_Furnace click here]''' | ||
''This page is written by DTU Nanolab internal'' | |||
===<span style="color:Red">EXPIRED! | |||
The Resist Pyrolysis furnace has been removed from the cleanroom August 2019. Use the Multipurpose Anneal furnace instead.</span>=== | |||
[[Category: Equipment |Thermal Resist Pyrolysis]] | [[Category: Equipment |Thermal Resist Pyrolysis]] | ||
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|style="background:LightGrey; color:black"|Temperature | |style="background:LightGrey; color:black"|Temperature | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
* | *Max 1000 <sup>o</sup>C | ||
*Temperature ramp-up rate: Max 10 <sup>o</sup>C/min | *Temperature ramp-up rate: Max 10 <sup>o</sup>C/min | ||
*Temperature ramp-down rate: Relative slow (depending on the furnace temperature) | *Temperature ramp-down rate: Relative slow (depending on the furnace temperature) | ||
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|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*N<sub>2</sub> | *N<sub>2</sub> | ||
|- | |- | ||
|style="background:LightGrey; color:black"|Vacuum | |style="background:LightGrey; color:black"|Vacuum | ||